For a six degree-of-freedom active vibration isolation system, a control strategy based on modal decoupling is proposed. This has the advantage of controlling the modal directions on a centralized single-input single-output basis. As a consequence, stability and performance can be imposed in each of the modal directions separately. An experimental demonstration is given using a dummy metrology frame. That is, a 1600 kg payload mass supported by three combined pneumatic and Lorentz controlled isolators. With this setup, two unstable modal directions resulting from a high center of gravity are stabilized without compromising performance in any of the remaining directions. In fact, performance in the remaining directions is enhanced using manual loop shaping.
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June 2005
Technical Papers
Active Vibration Isolation of Metrology Frames; A Modal Decoupled Control Design
Marcel Heertjes,
Marcel Heertjes
Philips Centre for Industrial Technology, Department Mechatronics Technologies, PO Box 218, SAQ-1137/1132, 5600 MD Eindhoven, The Netherlands
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Koen de Graaff,
Koen de Graaff
Philips Centre for Industrial Technology, Department Mechatronics Technologies, PO Box 218, SAQ-1137/1132, 5600 MD Eindhoven, The Netherlands
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Jan-Gerard van der Toorn, ASML
Jan-Gerard van der Toorn, ASML
Department Mechatronics Systems Development, De run 1110, 5503 LA Veldhoven, The Netherlands
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Marcel Heertjes
Philips Centre for Industrial Technology, Department Mechatronics Technologies, PO Box 218, SAQ-1137/1132, 5600 MD Eindhoven, The Netherlands
Koen de Graaff
Philips Centre for Industrial Technology, Department Mechatronics Technologies, PO Box 218, SAQ-1137/1132, 5600 MD Eindhoven, The Netherlands
Jan-Gerard van der Toorn, ASML
Department Mechatronics Systems Development, De run 1110, 5503 LA Veldhoven, The Netherlands
J. Vib. Acoust. Jun 2005, 127(3): 223-233 (11 pages)
Published Online: June 1, 2005
Article history
Received:
May 3, 2004
Revised:
October 13, 2004
Accepted:
October 21, 2004
Online:
May 18, 2005
Citation
Heertjes, M., de Graaff, K., and van der Toorn, J. (June 1, 2005). "Active Vibration Isolation of Metrology Frames; A Modal Decoupled Control Design." ASME. J. Vib. Acoust. June 2005; 127(3): 223–233. https://doi.org/10.1115/1.1897741
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