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Journal Articles

Error Budget of Wafer Bonding Alignment System Based on Vision

Rui Wang, Sen Lu, Kaiming Yang, Yu Zhu
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024503.
Paper No: JMNM-23-1057
https://doi.org/10.1115/1.4065333
Published Online: May 8, 2024
View Article titled, Error Budget of Wafer Bonding Alignment System Based on Vision
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Topics: Errors, Semiconductor wafers, Bonding
Proceedings Papers

Error Budget of Wafer Bonding Alignment System Based on Machine Vision

Rui Wang, Sen Lu, Kaiming Yang, Yu Zhu
Proc. ASME. IMECE2023, Volume 3: Advanced Manufacturing, V003T03A090, October 29–November 2, 2023
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2023-112938
https://doi.org/10.1115/IMECE2023-112938
View Paper titled, Error Budget of Wafer Bonding Alignment System Based on Machine Vision
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Topics: Bonding, Errors, Machinery, Semiconductor wafers
Proceedings Papers

Less Conservative Stability Constraint for Data-Based Feedback Tuning

Weicai Huang, Kaiming Yang, Yu Zhu, Sen Lu, Min Li
Proc. ASME. IMECE2020, Volume 7A: Dynamics, Vibration, and Control, V07AT07A002, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23370
https://doi.org/10.1115/IMECE2020-23370
View Paper titled, Less Conservative Stability Constraint for Data-Based Feedback Tuning
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Topics: Feedback, Stability, Closed loop systems, Engineering simulation, Simulation, Theorems (Mathematics)
Proceedings Papers

Edge Coil Force Fitting and Current Optimal Commutation Algorithm for Magnetic Levitation Planar Motor With Moving Magnet

Haobo Sun, Yu Zhu, Kaiming Yang, Sen Lu
Proc. ASME. IMECE2020, Volume 7A: Dynamics, Vibration, and Control, V07AT07A040, November 16–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2020-23534
https://doi.org/10.1115/IMECE2020-23534
View Paper titled, Edge Coil Force Fitting and Current Optimal Commutation Algorithm for Magnetic Levitation Planar Motor With Moving Magnet
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Topics: Algorithms, Engines, Fittings, Heat losses, Magnetic levitation, Magnets, Motors
Proceedings Papers

Data-Driven Feedforward Tuning Approach for LPV Motion Systems

Weicai Huang, Kaiming Yang, Yu Zhu, Sen Lu
Proc. ASME. IMECE2019, Volume 4: Dynamics, Vibration, and Control, V004T05A002, November 11–14, 2019
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2019-11203
https://doi.org/10.1115/IMECE2019-11203
View Paper titled, Data-Driven Feedforward Tuning Approach for LPV Motion Systems
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Topics: Feedforward control, Control equipment, Dynamics (Mechanics), Engineering simulation, Optimization, Polynomials, Simulation
Proceedings Papers

Dynamic Exposure Model of Scanning Beam Interference Lithography

Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang
Proc. ASME. IMECE2018, Volume 4A: Dynamics, Vibration, and Control, V04AT06A004, November 9–15, 2018
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2018-86979
https://doi.org/10.1115/IMECE2018-86979
View Paper titled, Dynamic Exposure Model of Scanning Beam Interference Lithography
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Topics: Lithography, Photoresists, Diffraction gratings, Process simulation