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Journal Articles

A Shunt-Assisted Silicon Electrode for Micro Electrochemical Machining

Yulan Zhu, Guodong Liu, Yong Li, Hao Tong, Peiyao Cao
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024502.
Paper No: JMNM-23-1046
https://doi.org/10.1115/1.4065329
Published Online: May 8, 2024
View Article titled, A Shunt-Assisted Silicon Electrode for Micro Electrochemical Machining
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Topics: Electrodes, Silicon, Corrosion, Machining
Journal Articles

Manufacturing Processes of Implantable Microelectrode Array for In Vivo Neural Electrophysiological Recordings and Stimulation: A State-Of-the-Art Review

Dongyang Yi, Yao Yao, Yi Wang, Lei Chen
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2022, 10(4): 041001.
Paper No: JMNM-23-1024
https://doi.org/10.1115/1.4063179
Published Online: October 9, 2023
View Article titled, Manufacturing Processes of Implantable Microelectrode Array for In Vivo Neural Electrophysiological Recordings and Stimulation: A State-Of-the-Art Review
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Topics: Manufacturing, Microwire, Probes, Silicon, Electrodes, Membrane electrode assemblies, Brain, Metals, Electrophysiology
Journal Articles

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Raul M. Lema Galindo, Paras Ajay, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2022, 10(3): 031001.
Paper No: JMNM-22-1035
https://doi.org/10.1115/1.4062167
Published Online: April 3, 2023
View Article titled, Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch
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Topics: Catalysts, Etching, Metals, Silicon, Nanoscale phenomena
Includes: Supplementary data
Journal Articles

Metal Assisted Chemical Etch of Polycrystalline Silicon

Crystal Barrera, Paras Ajay, Akhila Mallavarapu, Mark Hrdy, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021002.
Paper No: JMNM-22-1020
https://doi.org/10.1115/1.4055401
Published Online: September 27, 2022
View Article titled, Metal Assisted Chemical Etch of Polycrystalline Silicon
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Topics: Polysilicon, Metals, Columns (Structural), Etching, Silicon
Journal Articles

Molecular Dynamic Simulation of Micro-Structured Diamond Tool in Silicon Carbide Cutting

Changlin Liu, Jianning Chu, Jinyang Ke, Xiao Chen, Jianguo Zhang, Junfeng Xiao, Jianfeng Xu
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2021, 9(2): 021002.
Paper No: JMNM-20-1029
https://doi.org/10.1115/1.4050969
Published Online: May 10, 2021
View Article titled, Molecular Dynamic Simulation of Micro-Structured Diamond Tool in Silicon Carbide Cutting
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Topics: Cutting, Molecular dynamics, Silicon, Simulation, Wear, Diamond tools, Nanoscale phenomena
Journal Articles

Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays

Brian Gawlik, Ariel R. Barr, Akhila Mallavarapu, Edward T. Yu, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010904.
Paper No: JMNM-20-1008
https://doi.org/10.1115/1.4049959
Published Online: February 26, 2021
View Article titled, Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays
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Topics: Computers, Delays, Etching, Flaw detection, Glass, Imaging, Manufacturing, Particulate matter, Root cause analysis, Semiconductor wafers
Journal Articles

Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

Robert M. Panas, Martin L. Culpepper
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010902.
Paper No: JMNM-20-1013
https://doi.org/10.1115/1.4049123
Published Online: February 9, 2021
View Article titled, Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication
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Topics: Gages, Manufacturing, Microfabrication, Micromachining, Piezoresistors, Sensors, Silicon, Metals, Etching, Lasers
Journal Articles

Multi-Objective Optimization of Wire-Electric Discharge Machined Ultrathin Silicon Wafers Using Response Surface Methodology for Solar Cell Applications

Divyanshu Bhartiya, Pinal Rana, Meinam Annebushan Singh, Deepak Marla
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2020, 8(4): 041006.
Paper No: JMNM-20-1040
https://doi.org/10.1115/1.4049362
Published Online: January 18, 2021
View Article titled, Multi-Objective Optimization of Wire-Electric Discharge Machined Ultrathin Silicon Wafers Using Response Surface Methodology for Solar Cell Applications
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Topics: Damage, Electrical discharge machining, Optimization, Semiconductor wafers, Wire, Response surface methodology, Pareto optimization, Composite materials, Solar cells, Machining
Journal Articles

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Weijia Guo, Senthil Kumar Anantharajan, Xinquan Zhang, Hui Deng
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2020, 8(2): 024501.
Paper No: JMNM-19-1045
https://doi.org/10.1115/1.4046377
Published Online: March 27, 2020
View Article titled, A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching
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Topics: Atmospheric pressure, Crystals, Damage, Etching, Plasma etching, Plasmas (Ionized gases), Semiconductor wafers, Silicon, Surface roughness
Journal Articles

Numerical Investigation of Effect of Operating Parameters on the Phase Transformation During Vibration-Assisted Nano-Impact Machining of Silicon by Loose Abrasives

Nick H. Duong, Jianfeng Ma, Muhammad P. Jahan, Shuting Lei, Vamshi Krishna Kore, Murali Sundaram
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. March 2020, 8(1): 014501.
Paper No: JMNM-18-1069
https://doi.org/10.1115/1.4045762
Published Online: February 19, 2020
View Article titled, Numerical Investigation of Effect of Operating Parameters on the Phase Transformation During Vibration-Assisted Nano-Impact Machining of Silicon by Loose Abrasives
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Topics: Abrasives, Finite element methods, Machining, Phase transitions, Silicon, Vibration, Friction, Particulate matter
Journal Articles

A Study of Scratch Speed Effects on Ductile–Brittle Transition in Silicon

Chirag Alreja, Sathyan Subbiah
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2019, 7(2): 024505.
Paper No: JMNM-18-1042
https://doi.org/10.1115/1.4043647
Published Online: July 25, 2019
View Article titled, A Study of Scratch Speed Effects on Ductile–Brittle Transition in Silicon
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Topics: Brittleness, Diamond turning, Ductile-brittle transition, Fracture (Materials), Silicon, Density, Cutting
Journal Articles

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Irene Fassi, Lawrence Kulinsky, Martin Byung-Guk Jun
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Guest Editorial
J. Micro Nano-Manuf. March 2019, 7(1): 010301.
Paper No: JMNM-19-1015
https://doi.org/10.1115/1.4043692
Published Online: May 17, 2019
View Article titled, Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1
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Topics: Micromanufacturing, Nanomanufacturing, Additive manufacturing, Lasers, Manufacturing, Micromilling, Vibration, Adhesion, Carbon, Cathode ray oscilloscopes
Journal Articles

Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films

Martin Ward, Michael Cullinan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 011003.
Paper No: JMNM-18-1067
https://doi.org/10.1115/1.4043420
Published Online: May 15, 2019
View Article titled, Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films
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Topics: Design, Engineering prototypes, Fracture (Materials), Semiconductor wafers, Silicon, Stress, Surface roughness, Tension, Thin films, Wedges
Journal Articles

Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries

Fenfen Wang, Xianfeng Gao, Lulu Ma, Chris Yuan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 011001.
Paper No: JMNM-18-1032
https://doi.org/10.1115/1.4042383
Published Online: April 15, 2019
View Article titled, Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries
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Topics: Emissions, Lithium-ion batteries, Nanoparticles, Nanowires, Particulate matter, Silicon, Metals, Water, Chemical etching, Etching
Journal Articles

Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon

Chirag Alreja, Sathyan Subbiah
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2018, 6(4): 041001.
Paper No: JMNM-17-1039
https://doi.org/10.1115/1.4041508
Published Online: October 10, 2018
View Article titled, Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon
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Topics: Crystals, High temperature, Phase transitions, Pressure, Silicon, Temperature, Diamond turning, Diamonds
Journal Articles

Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide

Tsuneo Kurita, Koji Miyake, Kenji Kawata, Kiwamu Ashida, Tomohisa Kato
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2017, 5(3): 031004.
Paper No: JMNM-16-1072
https://doi.org/10.1115/1.4036828
Published Online: June 7, 2017
View Article titled, Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide
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Topics: Crystals, Machining, Polishing, Semiconductor wafers, Silicon
Journal Articles

Material Dependence of the Contact Behavior of Oscillating Microprobes—Modeling and Experimental Evidence

Sebastian Bohm, Boris Goj, Lars Dittrich, Lothar Dressler, Martin Hoffmann
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2017, 5(2): 021002.
Paper No: JMNM-16-1043
https://doi.org/10.1115/1.4035619
Published Online: March 2, 2017
View Article titled, Material Dependence of the Contact Behavior of Oscillating Microprobes—Modeling and Experimental Evidence
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Topics: Actuators, Adhesion, Damping, Energy dissipation, Modeling, Oscillations, Phase shift, Probes, Sensors, Simulation
Journal Articles

Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils With Silicon Punches

Sven Hildering, Ulf Engel, Marion Merklein
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2015, 3(2): 021001.
Paper No: JMNM-14-1052
https://doi.org/10.1115/1.4029629
Published Online: June 1, 2015
View Article titled, Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils With Silicon Punches
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Topics: Copper foil, Cutting, Errors, Silicon, Stress, Blanking (Metalworking), Simulation, Tension
Journal Articles

Fabrication of Polymer-Derived Silicon Oxycarbide Microparts and Their Mechanical Characteristics

Takahiro Namazu, Hiroyuki Kudara, Yoshio Hasegawa
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. December 2014, 2(4): 044501.
Paper No: JMNM-14-1013
https://doi.org/10.1115/1.4027734
Published Online: July 9, 2014
View Article titled, Fabrication of Polymer-Derived Silicon Oxycarbide Microparts and Their Mechanical Characteristics
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Topics: Casting, Cycles, Firing, Gears, Manufacturing, Mechanical properties, Microgears, Nanoindentation, Polymers, Silicon
Journal Articles

Effect of Micro-Injection Molding Processing Conditions on the Replication and Consistency of a Dense Network of High Aspect Ratio Microstructures

John W. Rodgers, Meghan E. Casey, Sabrina S. Jedlicka, John P. Coulter
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2014, 2(1): 011006.
Paper No: JMNM-13-1023
https://doi.org/10.1115/1.4026606
Published Online: February 20, 2014
View Article titled, Effect of Micro-Injection Molding Processing Conditions on the Replication and Consistency of a Dense Network of High Aspect Ratio Microstructures
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Topics: Cavities, Columns (Structural), Flow (Dynamics), Microscale devices, Molding, Polymers, Temperature, Tooling, Gates (Closures), Manufacturing