The scale-up of microcontact printing (μCP) to a roll-to-roll technique for large-scale surface patterning requires scalable tooling for continuous pattern printing with μm-scale features (e.g., 1–50 μm). Here, we examine the process of creating such a tool using an optical direct-write or “maskless” method working on a rotating cylindrical substrate. A predictive model of pattern formation is presented along with experimental results to examine the key control factors for this process. It is shown that factors can be modulated to vary the cross-sectional shape in addition to feature height and width. This feature can then be exploited to improve the robustness of the final printing process.
Issue Section:
Research Papers
Topics:
Geometry,
Lasers,
Manufacturing,
Photolithography,
Photoresists,
Printing,
Robustness,
Shapes,
Simulation,
Tooling,
Casting
References
1.
Biebuyck
, H. A.
, Larsen
, N. B.
, Delamarche
, E.
, and Michel
, B.
, 1997
, “Lithography Beyond Light: Microcontact Printing With Monolayer Resists
,” IBM J. Res. Dev.
, 41
(1.2
), pp. 159
–170
.10.1147/rd.411.01592.
Xia
, Y.
, and Whitesides
, G. M.
, 1998
, “Soft Lithography
,” Ann. Rev. Mater. Sci.
, 28
(1
), pp. 153
–184
.10.1146/annurev.matsci.28.1.1533.
Xia
, Y.
, Qin
, D.
, and Whitesides
, G. M.
, 1996
, “Microcontact Printing With a Cylindrical Rolling Stamp: A Practical Step Toward Automatic Manufacturing of Patterns With Submicrometer-Sized Features
,” Adv. Mater.
, 8
(12
), pp. 1015
–1017
.10.1002/adma.199600812174.
Rogers
, J. A.
, Bao
, Z.
, Makhija
, A.
, and Braun
, P.
, 1999
, “Printing Process Suitable for Reel-to-Reel Production of High-Performance Organic Transistors and Circuits
,” Adv. Mater.
, 11
(9
), pp. 741
–745
.10.1002/(SICI)1521-4095(199906)11:9<741::AID-ADMA741>3.0.CO;2-L5.
Lee
, H. H.
, Menard
, E.
, Tassi
, N. G.
, Rogers
, J. A.
, and Blanchet
, G. B.
, 2004
, “Large Area Microcontact Printing Presses for Plastic Electronics
,” MRS Online Proc. Libr.
, 846
(published online).10.1557/PROC-846-DD7.36.
Stagnaro
, A.
, 2008
, “Design and Development of a Roll-to-Roll Machine for Continuous High-Speed Microcontact Printing
,” M.Eng. thesis, Massachusetts Institute of Technology, Cambridge, MA.7.
Datar
, C. A.
, 2009
, “Design and Development of High Precision Elastomeric-Stamp Wrapping System for Roll-to-Roll Multi-Layer Microcontact Printing
,” M.Eng. thesis, Massachusetts Institute of Technology, Cambridge, MA.8.
Petrzelka
, J. E.
, and Hardt
, D. E.
, 2013
, “Laser Direct Write System for Fabricating Seamless Roll-to-Roll Lithography Tools
,” Proc. SPIE
, 8612
, pp. 8612-1
–8612-14
.10.1117/12.20047389.
Petrzelka
, J. E.
, and Hardt
, D. E.
, 2012
, “Static Load-Displacement Behavior of PDMS Microfeatures for Soft Lithography
,” IOP J. Micromech. Microeng.
, 22
(7
), p. 075015
.10.1088/0960-1317/22/7/07501510.
Hui
, C. Y.
, Jagota
, A.
, Lin
, Y. Y.
, and Kramer
, E. J.
, 2002
, “Constraints on Microcontact Printing Imposed by Stamp Deformation
,” Langmuir
, 18
(4
), pp. 1394
–1407
.10.1021/la011356711.
Perl
, A.
, Reinhoudt
, D. N.
, and Huskens
, J.
, 2009
, “Microcontact Printing: Limitations and Achievements
,” Adv. Mater.
, 21
(22
), pp. 2257
–2268
.10.1002/adma.20080186412.
Delamarche
, E.
, Schmid
, H.
, Michel
, B.
, and Biebuyck
, H.
, 1997
, “Stability of Molded Polydimethylsiloxane Microstructures
,” Adv. Mater.
, 9
(9
), pp. 741
–746
.10.1002/adma.1997009091413.
Ruiz
, S. A.
, and Chen
, C. S.
, 2007
, “Microcontact Printing: A Tool to Pattern
,” Soft Matter
, 3
(2
), pp. 168
–177
.10.1039/B613349E14.
Abgrall
, P.
, and Nguyen
, N.-T.
, 2009
, Nanofluidics
, Artech House
, Norwood, MA
.15.
Lipomi
, D. J.
, Martinez
, R. V.
, Cademartiri
, L.
, and Whitesides
, G. M.
, 2012
, “7.11: Soft Lithographic Approaches to Nanofabrication
,” Polym. Sci. Compr. Ref.
, 10
, pp. 211
–231
.10.1016/B978-0-444-53349-4.00180-116.
Chaudhury
, M. K.
, and Whitesides
, G. M.
, 1991
, “Direct Measurement of Interfacial Interactions Between Semispherical Lenses and Flat Sheets of Poly(dimethylsiloxane) and Their Chemical Derivatives
,” Langmuir
, 7
(5
), pp. 1013
–1025
.10.1021/la00053a03317.
Menard
, E.
, and Rogers
, J. A.
, 2010, “Stamping Techniques for Micro- and Nanofabrication,” Springer Handbook of Nanotechnology
, Springer
, New York
, pp. 313
–332
.10.1007/978-3-642-02525-9_1018.
Hizir
, F. E.
, Al-Qahtani
, H. M.
, and Hardt
, D. E.
, 2014
, “Deformation of Stamp Features With Slanted Walls During Microcontact Printing
,” COMSOL Conference
, Boston, MA.19.
Dill
, F. H.
, Hornberger
, W. P.
, Hauge
, P. S.
, and Shaw
, J. M.
, 1975
, “Characterization of Positive Photoresist
,” IEEE Trans. Electron Devices
, 22
(7
), pp. 445
–452
.10.1109/T-ED.1975.1815920.
Swinehart
, D. F.
, 1962
, “The Beer-Lambert Law
,” J. Chem. Educ.
, 39
(7
), pp. 333
–335
.10.1021/ed039p33321.
Schilling
, A.
, Herzig
, H. P.
, Stauffer
, L.
, Vokinger
, U.
, and Rossi
, M.
, 2001
, “Efficient Beam Shaping of Linear, High-Power Diode Lasers by Use of Micro-Optics
,” Appl. Opt.
, 40
(32
), pp. 5852
–5859
.10.1364/AO.40.00585222.
Sun
, H.
, 2012
, Laser Diode Beam Basics, Manipulations and Characterizations
, Springer Science & Business Media
, Medford, MA.10.1007/978-94-007-4664-023.
Mack
, C. A.
, 2007
, Fundamental Principles of Optical Lithography: The Science of Microfabrication
, Wiley
, Hoboken, NJ.10.1002/978047072387624.
Nietner
, L.
, 2014
, “A Direct-Write Thick-Film Lithography Process for Multi-Parameter Control of Tooling in Continuous Roll-to-Roll Microcontact Printing
,” S.M. thesis, Massachusetts Institute of Technology, Cambridge, MA.25.
Darbandi
, S. M.
, Firouz-Abadi
, R. D.
, and Haddadpour
, H.
, 2010
, “Buckling of Variable Section Columns Under Axial Loading
,” J. Eng. Mech.
, 136
(4
), pp. 472
–476
.10.1061/(ASCE)EM.1943-7889.0000096Copyright © 2015 by ASME
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