Micromanipulators play an important role in the precision engineering field from optical stages to micro-electromechanical systems for their excellent performances. In this paper, a 6-DOF perpendicular parallel micromanipulator (PPMM) is proposed and its prototype is developed. The isotropy and decoupled characteristics of the 6-DOF PPMM are discussed. The relationship among input-force, payload, stiffness, and displacement (IPSD) of the 6-DOF PPMM is studied and the model of the relationship among the IPSD is derived in an analytical style. The relation between voltage value of piezoelectric actuator and output displacement is obtained base on an IPSD model. Finally, the simulations by finite element method and the test of the prototype of the 6-DOF PPMM are performed. Compared with the results of simulations and the test, the feasibility of IPSD model is verified. The proposed model is useful for both digital control of the 6-DOF PPMMs and design of the micromanipulators.
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Research Papers
1.
Paros
, J.
, and Weisbord
, L.
, 1965, “How to Design Flexure Hinges
,” Mach. Des.
0024-9114, 37
(27
), pp. 151
–157
.2.
Smith
, S. T.
, Badami
, V. G.
, Dale
, J. S.
, and Xu
, Y.
, 1997, “Elliptical Flexure Hinges
,” Rev. Sci. Instrum.
0034-6748, 68
(3
), pp. 1474
–1483
.3.
Lobontiu
, N.
, Paine
, J. S. N.
, Garcia
, E.
, and Goldfarb
, M.
, 2001, “Corner-Filleted Flexure Hinges
,” ASME J. Mech. Des.
0161-8458, 123
(3
), pp. 346
–352
.4.
Furukawa
, E.
, and Mizuno
, M.
, 1990, “Displacement Amplification and Reduction by Means of Linkage
,” Bull. Jpn. Soc. Precis. Eng.
0582-4206, 24
(4
), pp. 285
–290
.5.
Lobontiu
, N.
, and Garcia
, E.
, 2003, “Two-Axis Flexure Hinges With Axially-Collocated and Symmetric Notches
,” Comput. Struct.
0045-7949, 81
(13
), pp. 1329
–1341
.6.
Lobontiu
, N.
, Paine
, J. S. N.
, Garcia
, E.
, and Goldfarb
, M.
, 2002, “Design of Symmetric Conic-Section Flexure Hinges Based on Closed-Form Compliance Equations
,” Mech. Mach. Theory
0094-114X, 37
(5
), pp. 477
–498
.7.
Kim
, J. H.
, Kim
, S. H.
, and Kwak
, Y. K.
, 2003, “Development of a Piezoelectric Actuator Using a Three-Dimensional Bridge-Type Hinge Mechanism
,” Rev. Sci. Instrum.
0034-6748, 74
(5
), pp. 2918
–2924
.8.
Park
, S. R.
, and Yang
, S. H.
, 2005, “A Mathematical Approach for Analyzing Ultra Precision Positioning System With Compliant Mechanism
,” J. Mater. Process. Technol.
0924-0136, 164–165
, pp. 1584
–1589
.9.
Ellis
, G. W.
, 1962, “Piezoelectric Micromanipulators
,” Science
0036-8075, 138
(3537
), pp. 84
–91
.10.
Hara
, A.
, and Sugimoto
, K.
, 1989, “Synthesis of Parallel Micromanipulators
,” ASME J. Mech., Transm., Autom. Des.
0738-0666, 111
(1
), pp. 34
–39
.11.
Arai
, T.
, Stoughton
, R.
, and Jaya
, Y. M.
, 1992, “Micro Hand Module Using Parallel Link Mechanism
,” Japan/USA Symposium on Flexible Automation
, San Francisco, CA, Vol. 1
, pp. 163
–168
.12.
Fukuda
, T.
, Fujiyoshi
, M.
, Arai
, F.
, and Matsuura
, H.
, 1991, “Design and Dextrous Control of Micromanipulator With 6 DOF
,” Proceedings of 1991 IEEE International Conference on Robotics and Automation
, Sacramento, CA, 2, pp. 1628
–1633
.13.
Grace
, K. W.
, Colgate
, J. E.
, Glucksberg
, M. R.
, and Chun
, J. H.
, 1993, “A Six Degree of Freedom Micromanipulator for Ophthalmic Surgery
,” Proceeding of 1993 IEEE International Conference on Robotics and Automation
, Atlanta, GA, pp. 630
–635
.14.
Hunter
, I. W.
, Lafontaine
, S.
, Nielsen
, P. M. F.
, Hunter
, P. J.
, and Hollerbach
, J. M.
, 1990, “Manipulation and Dynamic Mechanical Testing of Microscopic Objects Using a Tele-Micro-Robot System
,” IEEE Control Syst. Mag.
0272-1708, 10
(2
), pp. 3
–9
.15.
Tanikawa
, T.
, and Arai
, T.
, 1999, “Development of a Micro-Manipulation System Having a Two-Fingeredmicro-Hand
,” IEEE J. Rob. Automation
, 15
(1
), pp. 152
–162
.16.
Tanikawa
, T.
, Kawai
, M.
, Koyachi
, N.
, Arai
, T.
, Ide
, T.
, Kaneko
, S.
, Ohta
, R.
, and Hirose
, T.
, 2001, “Force Control System for Autonomous Micro Manipulation
,” IEEE International Conference on Robotics and Automation
, Vol. 1
, pp. 610
–615
.17.
Pernette
, E.
, Henein
, S.
, Magnani
, I.
, and Clavel
, R.
, 1997, “Design of Parallel Robots in Microrobotics
,” Robotica
0263-5747, 15
(4
), pp. 417
–420
.18.
Kallio
, P.
, Lind
, M.
, Zhou
, Q.
, and Koivo
, H. N.
, 1998, “A 3 DOF Piezohydraulic Parallel Micromanipulator
,” IEEE international Conference on Robotics and Automation
, pp. 1823
–1828
.19.
Hudgens
, J. C.
, and Tesar
, D.
, 1988, “A Fully-Parallel Six Degree-of-Freedom Micromanipulator: Kinematic Analysis and Dynamic Model
,” in Proc. 20th Biennial ASME Mechanisms Conference on Trends and Development in Mechanism Machines and Robotics
, Vol. 15
, pp. 29
–37
.20.
Dong
, W.
, Du
, Z.
, Sun
, L.
, and Zhang
, B.
, 2006, “A Compliant Ultra-Precision 6-DOF Parallel Positioner Based on the Coarse/Fine Dual Architecture
,” IEEE International Conference on Nano/Micro Engineered and Molecular Systems
, pp. 488
–492
.21.
Chung
, G. J.
, and Choi
, K. B.
, 2004, “Development of Nano Order Manipulation System Based on 3-PPR Planar Parallel Mechanism
,” Proceedings of the IEEE/ROBIO2004
, pp. 612
–616
.22.
Yao
Q.
, Dong
J.
and Ferreira
P.M.
, 2007, “A Novel Parallel-Kinematics Mechanisms for Integrated, Multi-Axis Nanopositioing Part1: Kinematics and Design for Fabrication
,” Precis. Eng.
0141-6359, 32
, pp. 20
–33
.23.
Dong
J.
, Yao
Q.
, and Ferreira
P.M.
, 2007, “A Novel Parallel-Kinematics Mechanisms for Integrated, Multi-Axis Nanopositioing Part 2: Dynamics, Control and Performance Analysis
,” Precis. Eng.
0141-6359, 32
, pp. 7
–19
.24.
Xu
, Q.
, and Li
, Y.
, 2007, “Design Modification of a 3-PRC Compliant Parallel Micro Manipulator for Micro/Nano Scale Manipulation
,” Proceedings of the 7th IEEE International Conference on Nanotechnology
, pp. 426
–431
.25.
Xu
, Q.
, and Li
, Y.
, 2007, “Static and Dynamics Performance Evaluation for a High Precision XYZ Compliant Parallel Micromanipulator
,” Proceedings of the IEEE International Conference on Robotics and Biomimetics
, pp. 65
–70
.26.
Han
, C. S.
, Hudgens
, J. C.
, Tesar
, D.
, and Traver
, A. E.
, 1991, “Modeling, Synthesis, Analysis, and Design of High Resolution Micromanipulator to Enhance Robot Accuracy
,” IEEE/RSJ International Workshop on Intelligent Robots and Systems RIOS ’91
, pp. 1157
–1162
.27.
Howell
, L. L.
, 2001, Compliant Mechanisms
, Wiley-Interscience
, Canada
.28.
Li
, Y.
, and Xu
, Q.
, 2005, “Novel Design of a 3-PUU Spatial Compliant Parallel Micromanipulator for Nanomanipulation
,” IEEE International Conference on Mechatronics and Automation
, Vol. 3
, pp. 1575
–1580
.29.
Tang
, X.
, Chen
, I. M.
, and Li
, Q.
, 2006, “Design and Nonlinear Modeling of a Large-Displacement XYZ Flexure Parallel Mechanism With Decoupled Kinematic Structure
,” Rev. Sci. Instrum.
0034-6748, 77
(11
), p. 115101
.30.
Dai
, J. S.
, and Zhao
, T. S.
, 2002, “Stiffness Characteristics and Kinematics Analysis of Two-Link Elastic Underactuated Manipulators
,” J. Rob. Syst.
0741-2223, 19
(4
), pp. 169
–176
.31.
Ottaviano
, E.
, Carbone
, G.
, and Ceccarelli
, M.
, 2003, “Workspace Analysis and Performances of a Binary Actuated Parallel Manipulator With Flexural Joints
,” J. Mech. Eng. Sci.
0022-2542, 217
, pp. 313
–330
.32.
Stewart
, D.
, 1965, “A Platform With Six Degrees of Freedom
,” Proc. Inst. Mech. Eng.
0020-3483, 180
, pp. 371
–386
.33.
Liu
P. K.
, Qu
, D. S.
, Wang
, L.
, and Sun
, L. N.
, 2002, “Design and Analysis of 2-DOF Nanopositioning Stage Drived by PZT
,” J. Piezoelectrics & Acou Stooptics
, 24
(1
), pp. 31
–34
. 1004-247434.
Waldron
, K. J.
, and Hunt
, K. H.
, 1991, “Series-Parallel Dualities in Actively Coordinated Mechanisms
,” Int. J. Robot. Res.
0278-3649, 10
(5
), pp. 473
–480
.35.
Bandyopadhyay
, S.
, and Ghosal
, A.
, 2008, “An Algebraic Formulation of Kinematic Isotropy and Design of Isotropic 6-6 Stewart Platform Manipulator
,” Mech. Mach. Theory
0094-114X, 43
, pp. 591
–616
.36.
Vorndran
, S.
, 2005, Pi Catalog: The World of Micro-and Nanopositioning 2005/2006
, PI-Polytec Group
, Karlsruhe, Germany
, pp. 4
–22
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