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Keywords: sapphire
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Eng. Mater. Technol. January 2008, 130(1): 011002.
Published Online: December 20, 2007
...Jiunn-Jyh Junz Wang; Yong-Yuan Liao This paper investigated the scribing process characteristics of the hard and brittle materials including single crystal silicon, STV glass, and sapphire substrate. Under various cutting angles, major process characteristics are examined including the groove...
