..., molecular biology, and clinical pathology. Such circuits require arrays of precisely fabricated channels. The width of the channel needs to be controlled and the surface finish of the channels needs to be on the submicron level. Microscale machining provides an attractive alternative to microelectro...

...Siva Venkatachalam; Steven Y. Liang This paper discusses the effects of ploughing and friction in microscale machining. The friction coefficient has previously been shown to be sensitive to the geometry of the abrasive particle and the depth of indentation. From a micromachining standpoint...