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1-3 of 3
Keywords: metallic thin films
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2010, 132(5): 051004.
Published Online: September 20, 2010
... and atomic force microscopy. The role of microstructure and composition in altering both the mechanical and shape memory properties of the films is discussed. 22 06 2009 01 07 2010 20 09 2010 20 09 2010 annealing atomic force microscopy metallic thin films nanoindentation...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. February 2004, 126(1): 10–17.
Published Online: March 18, 2004
... Engineering Division for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING . Manuscript received August 2003. Associate Editor: J. Cao. 01 August 2003 18 03 2004 laser materials processing internal stresses copper metallic thin films fatigue curvature measurement...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. February 2004, 126(1): 18–24.
Published Online: March 18, 2004
... copper metallic thin films indentation hardness internal stresses laser materials processing X-ray diffraction In recent years, failure and reliability problems in MEMS have been attracting increased attention 1 2 . While the dominant material in MEMS is silicon, metal and metallic thin...
