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Journal Articles

Study on Site-Selective Growth of Carbon Nanotubes and Diamond Films With Barrier Layers

Chun-Hsi Su, Chii-Ruey Lin, Guo-Tsai Liau, Ching-Yu Chang
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. December 2008, 130(6): 064501.
https://doi.org/10.1115/1.2976120
Published Online: October 9, 2008
...Chun-Hsi Su; Chii-Ruey Lin; Guo-Tsai Liau; Ching-Yu Chang Microwave plasma jet chemical vapor deposition is used to grow array types of carbon nanotubes and diamond films on silicon substrates. In this study, we report a patterned growth of carbon nanotubes and diamond films using the barrier layer...
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Topics: Carbon nanotubes, Diamond films, Electron field emission, Microwaves, Chemical vapor deposition