A new direct laser patterning system for improving the quality of the pattern on the glass substrate of large Flat Panel Displays (FPD) was developed, which consists of the laser machining center, the laser measurement system, and the adaptive rotational mirror system. The new system is distinguished from the existing system by its control mechanism which compensates for the laser beam error caused by the volumetric error of the multi-axis machine. The new system, in comparison with existing systems which control each stage of multi-axis, uses a fast steering mirror (FSM) and adaptive laser optics to compensate for the error of the laser beam on the substrate. Through this study, a mathematical model of the volumetric error of the multi-axis laser machining center was developed to quantify the geometric and the kinematic errors of each machine axis and their contributing effect on the substrate. The information contained in the mathematical model was expressed in a volumetric error matrix. Further, a mathematical model of the beam delivery was developed to measure the beam delivery on the substrate and its effect on the quality of the patterning. The patterning errors were corrected by using an FSM, which has two rotational angles. The viability of the proposed scheme was demonstrated through simulations and experiments.

1.
Forouhi
,
A. R.
,
Li
,
G. G.
, and
Bloomer
,
I.
, 1996, “
Optical Characterization of ITO Films Used in Flat Panel Displays
,”
Proc. SPIE
0277-786X,
2725
, pp.
471
477
.
2.
Tam
,
S. C.
,
Chen
,
Y. H.
,
Zheng
,
H. Y.
, and
Chen
,
W. L.
, 1997, “
Scribing of ITO-Coatings Using a Q-Switched Nd:YAG Laser
,”
Proc. SPIE
0277-786X,
3184
, pp.
186
194
.
3.
Jin
,
S. Y.
, 2004, “
A Study on Direct ITO Patterning of Large FPDs by Adaptive Laser Optics
,” Ph.D. thesis, Mechanical and Industrial Engineering, University of Illinois at Chicago, Chicago, IL.
4.
Dondorf
,
U.
, and
Ferreria
,
P. M.
, 1994, “
Optimal Budgeting of Quasistatic Machine Tool Errors
,”
J. Eng. Ind.
0022-0817,
116
, pp.
42
53
.
5.
Eman
,
K. F.
, and
Wu
,
B. T.
, 1987, “
A Generalized Geometric Model for Multi-Axis Machine
,”
CIRP Ann.
0007-8506,
36
, pp.
253
256
.
6.
Paul
,
R. P.
, 1981,
Robot Manipulators: Mathematics, Programming and Control
,
MIT Press
, Cambridge, MA, pp.
1
63
.
7.
Lin
,
P. D.
, 1989, “
Error Analysis, Measurement and Compensation for Multi-Axis Machines
,” Ph.D. thesis, Mechanical Engineering, Northwestern University, Evanston, IL.
8.
Lin
,
P. D.
, and
Eman
,
K. F.
, 1993, “
Direct Volumetric Error Evaluation for Multi-Axis Machines
,”
Int. J. Mach. Tools Manuf.
0890-6955,
33
, pp.
675
693
.
9.
Ferreira
,
P. M.
, and
Liu
,
R. C.
, 1986, “
An Analytical Quadratic Model for the Geometric Error of a Machine Tools
,”
J. Manuf. Syst.
0278-6125,
5
, pp.
51
63
.
10.
Kiridena
,
V.
, and
Ferreira
,
P. M.
, 1993, “
Mapping the Effects of Positioning Errors on the Volumetric Accuracy of Five-Axis CNC Machine Tools
,”
Int. J. Mach. Tools Manuf.
0890-6955,
33
, pp.
417
437
.
11.
Li
,
Y.
, and
Katz
,
J.
, 1995, “
Laser Beam Scanning by Rotary Mirrors. I. Modeling Mirror-Scanning Devices
,”
Appl. Opt.
0003-6935,
34
(
28
), pp.
6403
6416
.
12.
Donmez
,
M. A.
, and
Barash
,
M. M.
, 1986, “
A General Methodology for Machine Tool Accuracy Enhancement by Error Compensation
,”
Precis. Eng.
0141-6359,
8
, pp.
187
196
.
13.
Nelder
,
J. A.
, and
Mead
,
R.
, 1965, “
A Simplex Method for Function Minimization
,”
Comput. J.
0010-4620,
7
, pp.
308
313
.
14.
Lagarias
,
J. C.
,
Reeds
,
J. A.
,
Wright
,
M. H.
, and
Wright
,
P. E.
, 1998, “
Convergence Properties of the Nelder-Mead Simplex Method in Low Dimension
,”
J. Optim. Theory Appl.
0022-3239,
9
, pp.
112
147
.
15.
Mitchell
,
P. V.
, 2003,
FSM-200 Series Fast Steering Mirror and FSM-CD100 Controller/Driver Manual
.
You do not currently have access to this content.