... microactuators temperature measurement thermometers Raman spectroscopy thermometry MEMS thermal actuators Temperature diagnostics are essential tools for the evaluation and design of microelectronics devices and microelectromechanical systems (MEMSs). The length scale of these devices...

... actuator is shown in Fig. 1 with corresponding dimensional details in Table 1 and material property data in Table 2 . 2 Schematic of the thermal actuator before and after actuation 1 Design of the thermal actuator Thermal microactuators are compact and can provide high...