Direct Measurement of Thermal Emission From a Fabry–Perot Cavity Resonator

There have been growing interests in selective control of thermal emission by using micro/nanostructures. The present study describes direct measurements of infrared thermal emission at elevated temperatures of an asymmetric Fabry–Perot resonator at variable angles for each polarization. The multilayered structure mainly contains a SiO₂ optical cavity sandwiched between a thick (opaque) Au film and a thin Au film. Metallic adhesive and diffusion-barrier layers were deposited on a Si substrate before depositing the thick Au film. A dielectric protection layer was deposited atop the thin Au film to prevent oxidation at high temperatures. A SiC wafer was used as the reference to test the emittance measurement facility, which includes a heated sample holder, a blackbody source, mirror assembly, a polarizer, and a Fourier-transform infrared spectrometer with different detectors. The measured emittance spectra of the Fabry–Perot structure exhibit peak broadening and shifting as temperature increases; the mechanisms are elucidated by comparison with theoretical modeling.