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Journal Articles

Fixed Structure Feedforward Controller Design Exploiting Iterative Trials: Application to a Wafer Stage and a Desktop Printer

Stan H. van der Meulen, Rob L. Tousain, Okko H. Bosgra
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. September 2008, 130(5): 051006.
https://doi.org/10.1115/1.2957626
Published Online: August 4, 2008
... to possible variations that occur in the plant dynamics. Experimental results on a high-precision wafer stage and a desktop printer illustrate the procedure. 13 07 2006 07 05 2008 04 08 2008 control system synthesis electromechanical effects feedforward integrated circuit manufacture...
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Topics: Control equipment, Feedforward control, Optimization, Errors