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Journal Articles

Fixed Structure Feedforward Controller Design Exploiting Iterative Trials: Application to a Wafer Stage and a Desktop Printer

Stan H. van der Meulen, Rob L. Tousain, Okko H. Bosgra
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. September 2008, 130(5): 051006.
https://doi.org/10.1115/1.2957626
Published Online: August 4, 2008
... to possible variations that occur in the plant dynamics. Experimental results on a high-precision wafer stage and a desktop printer illustrate the procedure. 13 07 2006 07 05 2008 04 08 2008 control system synthesis electromechanical effects feedforward integrated circuit manufacture...
View Article titled, Fixed Structure Feedforward Controller Design Exploiting Iterative Trials: Application to a Wafer Stage and a Desktop Printer
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Topics: Control equipment, Feedforward control, Optimization, Errors