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Journal Articles

Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping

Chu Rainer Kwang-Hua
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. September 2020, 142(9): 094502.
Paper No: DS-19-1164
https://doi.org/10.1115/1.4047012
Published Online: May 11, 2020
View Article titled, Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping
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Topics: Cantilevers, Damping, Fluids, Microelectromechanical systems, Pressure, Q-factor, Knudsen number, Energy dissipation, Resonance, Semiconductor wafers
Journal Articles

Nonlinear Models for Magnet Placement in Individually Actuated Magnetic Cilia Devices

Nathan Banka, Santosh Devasia
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. June 2018, 140(6): 061011.
Paper No: DS-17-1233
https://doi.org/10.1115/1.4038534
Published Online: December 22, 2017
View Article titled, Nonlinear Models for Magnet Placement in Individually Actuated Magnetic Cilia Devices
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Topics: Cantilevers, Deflection, Electromagnets, Magnetic fields, Magnets, Modeling, Fittings, Stress
Journal Articles

Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency

Dumitru I. Caruntu, Martin W. Knecht
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research-Article
J. Dyn. Sys., Meas., Control. April 2015, 137(4): 041016.
Paper No: DS-12-1363
https://doi.org/10.1115/1.4028887
Published Online: April 1, 2015
View Article titled, Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency
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Topics: Cantilevers, Microelectromechanical systems, Steady state, Frequency response, Casimir force, Damping
Journal Articles

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Georg E. Fantner, Daniel J. Burns, Angela M. Belcher, Ivo W. Rangelow, Kamal Youcef-Toumi
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Dynamic Modeling Control And Manipulation At The Nanoscale
J. Dyn. Sys., Meas., Control. November 2009, 131(6): 061104.
https://doi.org/10.1115/1.4000378
Published Online: November 6, 2009
View Article titled, DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation
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Topics: Actuators, Atomic force microscopy, Cantilevers, Deflection, Imaging
Journal Articles

DMCMN: Experimental/Analytical Evaluation of the Effect of Tip Mass on Atomic Force Microscope Cantilever Calibration

Matthew S. Allen, Hartono Sumali, Peter C. Penegor
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. November 2009, 131(6): 064501.
https://doi.org/10.1115/1.4000160
Published Online: October 30, 2009
View Article titled, DMCMN: Experimental/Analytical Evaluation of the Effect of Tip Mass on Atomic Force Microscope Cantilever Calibration
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Topics: Atomic force microscopy, Calibration, Cantilevers, Probes, Errors, Elastic constants, Mode shapes, Stiffness, Density
Journal Articles

Heterodyne Digital Control of a High-Frequency Micromechanical Oscillator

Thomas E. Kriewall, Joseph L. Garbini, John A. Sidles, Jonathan P. Jacky
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. September 2006, 128(3): 577–583.
https://doi.org/10.1115/1.2229258
Published Online: October 23, 2005
View Article titled, Heterodyne Digital Control of a High-Frequency Micromechanical Oscillator
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Topics: Cantilevers, Control equipment, Signals, Noise (Sound), Hardware, Feedback
Journal Articles

A Capacitive Microcantilever: Modelling, Validation, and Estimation Using Current Measurements

Mariateresa Napoli, Bassam Bamieh, Kimberly Turner
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. June 2004, 126(2): 319–326.
https://doi.org/10.1115/1.1767851
Published Online: August 5, 2004
View Article titled, A Capacitive Microcantilever: Modelling, Validation, and Estimation Using Current Measurements
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Topics: Cantilevers, Resonance, Signals, Excitation, Dynamics (Mechanics), Design, Differential equations
Journal Articles

Prototype of a Microtesting System Made by the LIGA Process to Measure the Young’s Modulus in Cantilever Microbeams

P. Ruther, W. Bacher, K. Feit, D. Maas, W. Menz
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. March 1997, 119(1): 57–60.
https://doi.org/10.1115/1.2801214
Published Online: March 1, 1997
View Article titled, Prototype of a Microtesting System Made by the LIGA Process to Measure the Young’s Modulus in Cantilever Microbeams
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Topics: Cantilevers, Engineering prototypes, Microbeams, Young's modulus, Actuators, Adhesives, Bonding, Glass, Manganese (Metal), Microactuators
Journal Articles

Vibration Control in Rotating or Translating Elastic Systems

A. Galip Ulsoy
Journal: Journal of Dynamic Systems, Measurement, and Control
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. March 1984, 106(1): 6–14.
https://doi.org/10.1115/1.3149666
Published Online: March 1, 1984
View Article titled, Vibration Control in Rotating or Translating Elastic Systems
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Topics: Belts, Cantilevers, Circular saws, Control equipment, Design, Rotation, Simulation results, String, Vibration, Vibration control