In this paper, the feedforward controller design problem for high-precision electromechanical servo systems that execute finite time tasks is addressed. The presented procedure combines the selection of the fixed structure of the feedforward controller and the optimization of the controller parameters by iterative trials. A linear parametrization of the feedforward controller in a two-degree-of-freedom control architecture is chosen, which results in a feedforward controller that is applicable to a class of motion profiles as well as in a convex optimization problem, with the objective function being a quadratic function of the tracking error. Optimization by iterative trials avoids the need for detailed knowledge of the plant, achieves the controller parameter values that are optimal with respect to the actual plant, and allows for the adaptation to possible variations that occur in the plant dynamics. Experimental results on a high-precision wafer stage and a desktop printer illustrate the procedure.
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e-mail: s.h.v.d.meulen@tue.nl
e-mail: rob.tousain@philips.com
e-mail: o.h.bosgra@tue.nl
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September 2008
Research Papers
Fixed Structure Feedforward Controller Design Exploiting Iterative Trials: Application to a Wafer Stage and a Desktop Printer
Stan H. van der Meulen,
Stan H. van der Meulen
Control Systems Technology Group, Department of Mechanical Engineering,
e-mail: s.h.v.d.meulen@tue.nl
Eindhoven University of Technology
, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
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Rob L. Tousain,
Rob L. Tousain
Drives and Control Group, Department of Mechatronics,
e-mail: rob.tousain@philips.com
Philips Applied Technologies
, High Tech Campus 7, 5656 AE Eindhoven, The Netherlands
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Okko H. Bosgra
Okko H. Bosgra
Control Systems Technology Group, Department of Mechanical Engineering,
e-mail: o.h.bosgra@tue.nl
Eindhoven University of Technology
, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
Search for other works by this author on:
Stan H. van der Meulen
Control Systems Technology Group, Department of Mechanical Engineering,
Eindhoven University of Technology
, P.O. Box 513, 5600 MB Eindhoven, The Netherlandse-mail: s.h.v.d.meulen@tue.nl
Rob L. Tousain
Drives and Control Group, Department of Mechatronics,
Philips Applied Technologies
, High Tech Campus 7, 5656 AE Eindhoven, The Netherlandse-mail: rob.tousain@philips.com
Okko H. Bosgra
Control Systems Technology Group, Department of Mechanical Engineering,
Eindhoven University of Technology
, P.O. Box 513, 5600 MB Eindhoven, The Netherlandse-mail: o.h.bosgra@tue.nl
J. Dyn. Sys., Meas., Control. Sep 2008, 130(5): 051006 (16 pages)
Published Online: August 4, 2008
Article history
Received:
July 13, 2006
Revised:
May 7, 2008
Published:
August 4, 2008
Citation
van der Meulen, S. H., Tousain, R. L., and Bosgra, O. H. (August 4, 2008). "Fixed Structure Feedforward Controller Design Exploiting Iterative Trials: Application to a Wafer Stage and a Desktop Printer." ASME. J. Dyn. Sys., Meas., Control. September 2008; 130(5): 051006. https://doi.org/10.1115/1.2957626
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