Nonlinear Dynamics of MEMS Arches Assuming Out-of-Plane Actuation Arrangement

[+] Author and Article Information
Hassen Ouakad

Mechanical & Industrial Engineering Department Sultan Qaboos University MUSCAT, Al-Khoudh PO BOX 33 Oman houakad@squ.edu.om

Fehmi Najar

Tunisia Polytechnic School, University of Carthage B.P. 743 LA MARSA, TUNIS 2078 Tunisia fehmi.najar@ept.rnu.tn

1Corresponding author.

Contributed by the Technical Committee on Vibration and Sound of ASME for publication in the Journal of Vibration and Acoustics. Manuscript received October 1, 2018; final manuscript received February 27, 2019; published online xx xx, xxxx. Assoc. Editor: Slava Krylov.

ASME doi:10.1115/1.4043064 History: Received October 01, 2018; Accepted February 28, 2019


In this work, the nonlinear dynamics of a microbeam shallow arch actuated Through an out-of-plane electrostatic force arrangement, is investigated. A reduced order model is developed to analyze the static, free vibration and nonlinear dynamic response of the microstructure under different DC and AC load conditions. Numerical investigation is conducted comparing the response of the arch near primary and secondary resonances using a nonparallel plates actuation scheme where the arch itself forms a moving electrode. The results show that the nonparallel excitation can be effcient for primary and secondary resonances excitation. Moreover, unlike the classical parallel plates method, where the structure is vulnerable to the dynamic pull-in instability, this nonparallel excitation arrangement can provide large amplitude motion while protecting the structure from the so-called static and dynamic pull-in instabilities. In addition to primary resonance, secondary resonances are demonstrated at twice and one-half the primary resonance frequency. The ability to actuate primary and/or secondary resonances without reaching the dynamic pull-in instability can serve various applications where large strokes increase their performance, such as for resonator based sensitive mass sensors.

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