Active Vibration Isolation of Metrology Frames; A Modal Decoupled Control Design

[+] Author and Article Information
Marcel Heertjes, Koen de Graaff

Philips Centre for Industrial Technology, Department Mechatronics Technologies, PO Box 218, SAQ-1137/1132, 5600 MD Eindhoven, The Netherlands

Jan-Gerard van der Toorn

Department Mechatronics Systems Development, De run 1110, 5503 LA Veldhoven, The Netherlands

J. Vib. Acoust 127(3), 223-233 (Jun 01, 2005) (11 pages) doi:10.1115/1.1897741 History: Received May 03, 2004; Revised October 13, 2004; Accepted October 21, 2004; Online May 18, 2005


For a six degree-of-freedom active vibration isolation system, a control strategy based on modal decoupling is proposed. This has the advantage of controlling the modal directions on a centralized single-input single-output basis. As a consequence, stability and performance can be imposed in each of the modal directions separately. An experimental demonstration is given using a dummy metrology frame. That is, a 1600 kg payload mass supported by three combined pneumatic and Lorentz controlled isolators. With this setup, two unstable modal directions resulting from a high center of gravity are stabilized without compromising performance in any of the remaining directions. In fact, performance in the remaining directions is enhanced using manual loop shaping.

Copyright © 2005 by American Society of Mechanical Engineers
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