Constrained Layer Damping Treatments for Microstructures

[+] Author and Article Information
Yi-Chu Hsu, I. Y. Shen

Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600

J. Vib. Acoust 124(4), 612-616 (Sep 20, 2002) (5 pages) doi:10.1115/1.1500743 History: Received March 01, 2001; Revised April 01, 2002; Online September 20, 2002
Copyright © 2002 by ASME
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Grahic Jump Location
Comparison of FRF for the first mode measured at the corner
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Comparison of FRF for the first mode measured at the centerline
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Comparison of FRF for the second mode measured at the corner
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Constrained layer damping treatments
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Comparison of FRF for the second mode measured at the centerline
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PZT actuator and the specimen for experimental verification
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Beams with and without MCLT on the same wafer, (a) top view and (b) front view
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MCLT fabrication processes



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