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Technical Brief

Electromechanical Coupling and Frequency Characteristics of a Quartz Crystal Resonator Covered With Micropillars

[+] Author and Article Information
Xuan Xie

College of Hydraulic & Environmental Engineering,
China Three Gorges University,
Yichang 443002, China
e-mail: lifeyeart@foxmail.com

Jiemin Xie

State Grid Hunan Electric Power Test & Research Institute,
Changsha 410007, China
e-mail: jemmy_1989@126.com

Wei Luo

College of Hydraulic & Environmental Engineering,
China Three Gorges University,
Yichang 443002, China
e-mail: wluo@lzu.edu.cn

Zeyan Wu

College of Hydraulic & Environmental Engineering,
China Three Gorges University,
Yichang 443002, China
e-mail: wuzeyan2000@163.com

1Corresponding author.

Contributed by the Technical Committee on Vibration and Sound of ASME for publication in the Journal of Vibration and Acoustics. Manuscript received August 9, 2018; final manuscript received February 17, 2019; published online March 5, 2019. Assoc. Editor: Slava Krylov.

J. Vib. Acoust 141(4), 044501 (Mar 05, 2019) (4 pages) Paper No: VIB-18-1341; doi: 10.1115/1.4042936 History: Received August 09, 2018; Accepted February 17, 2019

Recently, some researchers have studied the frequency characteristics of a quartz crystal resonator (QCR) covered with micropillars to measure the physical and geometric parameters of the micropillars. A recent study showed that the QCR-pillars device can greatly enhance the sensitivity when compared with conventional QCR sensors. In this research, we calculate the frequency and bandwidth shift of a QCR covered with micropillars based on the transmission line model with conductance analysis and small-load approximation, respectively. Numerical results showed that the frequency and bandwidth shift of QCR changed significantly when the height of the pillar approaches the critical height, which implies the coupled resonance. Two results fit very well except for the neighborhood of resonance point where the small-load approximation does not hold. The small-load approximation is quite simple and efficient as long as the frequency shift is small. The conductance analysis is relatively complicated but can deal with any case. The outcomes of this research are helpful for micro/nanowires characterization and further improvement of QCR-pillars devices for various applications such as biochemical sensors.

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References

Thompson, M., Kipling, A. L., Duncanhewitt, W. C., Rajakovi, L. V., and Avivlasak, B. A., 1991, “Thickness-Shear-Mode Acoustic Wave Sensors in the Liquid Phase. A Review,” Analyst, 116(9), pp. 881–890. [CrossRef]
Lu, C., and Czanderna, A. W., 1984, Applications of Piezoelectric Quartz Crystal Microbalances, Elsevier, Amsterdam.
Sauerbrey, G., 1959, “Verw endung von Schwingquarzen zur Wagung dunner Schichten und zur Mikrowagung,” Zeitschrift für physik, 155, pp. 206–222. [CrossRef]
Dybwad, G. L., 1985, “A Sensitive New Method for the Determination of Adhesive Bonding Between a Particle and a Substrate,” J. Appl. Phys., 58(7), pp. 2789–2790. [CrossRef]
Pomorska, A., Shchukin, D., Hammond, R., Cooper, M. A., Grundmeier, G., and Johannsmann, D., 2010, “Positive Frequency Shifts Observed Upon Adsorbing Micron-Sized Solid Objects to a Quartz Crystal Microbalance From the Liquid Phase,” Anal. Chem., 82, pp. 2237–2242. [CrossRef] [PubMed]
Liu, N., Yang, J., and Wang, J., 2011, “Shear Vibration of a Crystal Plate Carrying an Array of Microbeams,” Philos. Mag. Lett., 91(9), pp. 572–581. [CrossRef]
Hu, Y., Hu, H., Luo, B., Xue, H., Xie, J., and Wang, J., 2013, “Frequency Shift of a Crystal Quartz Resonator in Thickness-Shear Modes Induced by an Array of Hemispherical Material Units,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control., 60(8), pp. 1777–1782. [CrossRef] [PubMed]
Kanazawa, K. K., 1997, “Mechanical Behaviour of Films on the Quartz Microbalance,” Faraday Discuss., 107, pp. 77–90. [CrossRef]
Kashan, M. A. M., Kalavally, V., Lee, H. W., and Ramakrishnan, N., 2016, “Resonant Characteristics and Sensitivity Dependency on the Contact Surface in QCM-Micropillar-Based System of Coupled Resonator Sensors,” J. Phys. D: Appl. Phys., 49(19), 195303. [CrossRef]
Johannsmann, D., 2015, The Quartz Crystal Microbalance in Soft Matter Research, Springer, Berlin.
Granstaff, V. E., and Martin, S. J., 1994, “Characterization of a Thicknessshear Mode Quartz Resonator With Multiple Nonpiezoelectric Layers,” J. Appl. Phys., 75, pp. 1319–1329. [CrossRef]
Jiménez, Y., Otero, M., and Arnau, A., 2004, Piezoelectric Transducers and Applications, Springer, Berlin.
Wang, P., Su, J., Dai, W., Cernigliaro, G., and Sun, H., 2014, “Ultrasensitive Quartz Crystal Microbalance Enabled by Micropillar Structure,” Appl. Phys. Lett., 104(4), 043504. [CrossRef]
Wang, P., Su, J., Su, C. F., Dai, W., Cernigliaro, G., and Sun, H., 2014, “An Ultrasensitive Quartz Crystal Microbalance-Micropillars Based Sensor for Humidity Detection,” J. Appl. Phys., 115(22), 224501. [CrossRef]
Hossenlopp, J., Jiang, L., Cernosek, R., and Josse, F., 2004, “Characterization of Epoxy Resin (SU-8) Film Using Thickness-Shear Mode (TSM) Resonator Under Various Conditions,” J. Polym. Sci. Part B: Polym. Phys., 42(12), pp. 2373–2384. [CrossRef]
Wu, H., Zhao, G., Zu, H., Wang, J. H. C., and Wang, Q., 2015, “Aging-Related Viscoelasticity Variation of Tendon Stem Cells (TSCs) Characterized by Quartz Thickness Shear Mode (TSM) Resonators,” Sens. Actuators B: Chem., 210, pp. 369–380. [CrossRef]

Figures

Grahic Jump Location
Fig. 1

(a) Sketch of a QCR covered with an array of micropillars and (b) schematic diagram of the thickness shear vibration of the loaded QCR driven by an AC voltage

Grahic Jump Location
Fig. 2

(a) Shear vibration of the pillar and (b) continuity conditions at QCR-pillars interface

Grahic Jump Location
Fig. 3

Electrical conductance spectrum curve

Grahic Jump Location
Fig. 4

Frequency shift versus pillar height

Grahic Jump Location
Fig. 5

Modes of pillars at point A and point B

Grahic Jump Location
Fig. 6

Bandwidth shift versus beam length

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