Optimal Design of a Stable Fuzzy Controller for Beyond Pull-In Stabilization of Electrostatically Actuated Circular Microplates

[+] Author and Article Information
Mohsen Bakhtiari-Shahri

School of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad, Iran

Hamid Moeenfard

School of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad, Iran; Center of Excellence in Soft Computing and Intelligent Information Processing, Ferdowsi University of Mashhad, Mashhad, Iran

1Corresponding author.

ASME doi:10.1115/1.4041399 History: Received November 25, 2017; Revised September 01, 2018


The current paper aims to provide an optimal stable fuzzy controller to extend the travel range of a pair of flexible electrostatically actuated circular microplates beyond their pull-in limit. The single mode assumption is utilized to derive the equation of motion of the system based on a Lagrangian approach. The static behavior of the system is studied using the proposed model, and the utilized assumption and the relevant results are closely verified by nonlinear finite element simulations. The open-loop dynamic analysis is also performed to derive the linguistic rules governing the voltage-deflection behavior of the system. The mentioned rules are then employed for designing a fuzzy controller which controls the deflection of the microplates. The proposed fuzzy controller benefits from Gaussian fuzzifier which helps suppressing the noise effects in the feedback loop. The controller is then optimized to provide better response specifications. The performance of the optimal fuzzy controller is compared with that of the optimal PID controller and obvious superiorities in terms of noise suppression and stability enhancement is observed. To guarantee the stability of the closed-loop system, another higher-level controller is designed to oversee the behavior of the fuzzy controller. Simulation results reveal that the superintended fuzzy controller can prevent instability, while fairly extending the travel range of system and providing it with a better transient response. The suggested design approach proposed in this paper may be used to improve the performance of many nano/micro devices and nano/micro positioning systems.

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