Voltage-Induced Snap-Through of an Asymmetrically Laminated, Piezoelectric, Thin-Film Diaphragm Micro-actuator: Part 1--Experimental Studies and Mathematical Modeling

[+] Author and Article Information
Wei-Che Tai

Postdoctoral Researche, Department of Mechanical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061

Chuan Luo

Assistant Professor, Department of Precision Instruments, Tsinghua University, Beijing, China

Chen-Wei Yang

Graduate Student, Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, Los Angeles, CA 90095-1597

Guozhong Cao

Professor, Department of Material Science and Engineering, University of Washington, Seattle, WA 98195-2120, USA

I. Y. (Steve) Shen

Professor, Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600

1Corresponding author.

ASME doi:10.1115/1.4039535 History: Revised February 21, 2018


A piezoelectric thin-film micro-actuator in the form of an asymmetrically laminated diaphragm is developed as an intracochlear hearing aid. Experimentally, natural frequencies of the micro-actuator bifurcate with respect to an applied bias voltage. To qualitatively explain the findings, we model the PZT diaphragm as a doubly curved, asymmetrically laminated, piezoelectric shallow shell defined on a rectangular domain with simply supported boundary conditions. The von Karman type nonlinear strain-displacement relationship and the Donnell-Mushtari-Vlasov theory are used to calculate the electric enthalpy and elastic strain energy. Balance of virtual work between two top electrodes is also considered to incorporate an electric-induced displacement field that has discontinuity of in-plane strain components. A set of discretized equations of motion is obtained through a variational approach.

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