Vibrational Response of Initially Deformed Bi-stable Microbeams Under the Combined Effect of Mechanical Shock Loads and Electrostatic Forces

[+] Author and Article Information

Mechanical Engineering Department, King Fahd University of Petroleum & Minerals, Dhahran, 31261, Kingdom of Saudi Arabia

Hassen M. OUAKAD

Mechanical Engineering Department, King Fahd University of Petroleum & Minerals, Dhahran, 31261, Kingdom of Saudi Arabia

1Corresponding author.

ASME doi:10.1115/1.4038107 History: Received May 01, 2017; Revised September 13, 2017


This paper focus on the influence of sudden drop tests on the nonlinear structural behavior of electrically actuated bi-table shallow Micro-Electro-Mechanical-Systems (MEMS) arches. The assumed structure consist of an initially bell-shaped doubly clamped microbeam with a rectangular cross-section. The Euler-Bernoulli beam theory is assumed to model the nonlinear structural behavior of the bi-stable system under the combined effect of both the DC actuating load and the shaking waves. Moreover, the structural model takes into account both geometric mid-plane stretching and electric actuation nonlinear terms. A multi-modes Galerkin based decomposition is used to discretize the beam equations to extract a reduced-order model (ROM). The convergence of the ROM simulations are first verified and furthermore compared to published experimental data. A thorough ROM parametric study showed that the effect of increasing the shallow arch initial rise alter drastically the system behavior from undergoing a uninterrupted snap-through motion to a sudden snap-through instability. Moreover, the arch rise relationship with its shock spectrum response is investigated and it was concluded that as increasing the rise value can cause the system to collapse under the combined DC and shock wave loadings if the shock wave duration is lower or near the system fundamental natural period. All the presented graphs in this investigation represent some robust numerical approaches and design tools to help MEMS designers in improving both the reliability and efficiency of these bi-stable based micro-devices under shaking dynamic environments.

Copyright (c) 2017 by ASME
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