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research-article

The effects of initial rise and axial loads on MEMS arches

[+] Author and Article Information
Sherif A. Tella

Physical Science and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi Arabia
sherif.tella@kaust.edu.sa

Amal Z. Hajjaj

Department of Mechanical Engineering, State University of New York, Binghamton, NY 13902, USA
amal.hajjaj@kaust.edu.sa

Mohammed Ibrahim Younis

Physical Science and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi ArabiaDepartment of Mechanical Engineering, State University of New York, Binghamton, NY 13902, USA
mohammad.younis@kaust.edu.sa

1Corresponding author.

ASME doi:10.1115/1.4036400 History: Received December 01, 2016; Revised March 19, 2017

Abstract

Arch microbeams have been utilized and proposed for many uses over the past few years due to their large tunability and bistability. However, recent experimental data have shown different mechanical behavior of arches when subjected to axial loads. This paper aims to investigate in depth the influence of the competing effects of initial rise and axial loads on the mechanical behavior of micromachined arches; mainly their static deflection and resonant frequencies. Based on analytical solutions, the static response and eigenvalue problems are analyzed for various values of initial rises and axial loads. Universal curves showing the variation of the first three resonance frequencies of the arch are generated for various values of initial rise under both tensile and compressive axial loads. This study shows that increasing the tensile or compressive axial loads for different values of initial rise may lead to either increase in the stiffness of the beam or initial decrease in the stiffness, which later increases as the axial load is increased depending on the dominant effect of the initial rise of the arch and the axial load. The obtained universal curves represent useful design tools to predict the tunability of arches under axial loads for various values of initial rises. The use of the universal curves is demonstrated with an experimental case study. Analytical formulation is developed to predict the point of minimum where the trend of the resonance frequency versus axial loads changes qualitatively due to the competing effects of axial loads and initial curvature.

Copyright (c) 2017 by ASME
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