De Pasquale,
G.
,
Barbato,
M.
,
Giliberto,
V.
,
Meneghesso,
G.
, and
Somà,
A.
, 2012, “
Reliability Improvement in Microstructures by Reducing the Impact Velocity Through Electrostatic Force Modulation,” Microelectron. Reliab.,
52, pp. 1808–1811.
[CrossRef]
Tazzoli,
A.
,
Barbato,
M.
,
Mattiuzzo,
F.
,
Ritrovato,
V.
, and
Meneghesso,
G.
, 2010, “
Study of the Actuation Speed, Bounces Occurrences, and Contact Reliability of Ohmic RF-MEMS Switches,” Microelectron. Reliab.,
50(9–11), pp. 1604–1608.
[CrossRef]
De Pasquale,
G.
,
Somà,
A.
,
Barbato,
M.
, and
Meneghesso,
G.
, 2014, “
Impact Wear and Other Contact Effects on the Electro-Mechanical Reliability of MEMS,” Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Cannes, France, Apr. 1–4, pp. 7–12.
Grade,
J. D.
,
Jerman,
H.
, and
Kenny,
T. W.
, 2003, “
Design of Large Deflection Electrostatic Actuators,” J. Microelectromech. Syst.,
12(3), pp. 335–343.
[CrossRef]
Jensen,
B. D.
,
Mutlu,
S.
,
Miller,
S.
,
Kurabayashi,
K.
, and
Allen,
J. J.
, 2003, “
Shaped Comb Fingers for Tailored Electromechanical Restoring Force,” J. Microelectromech. Syst.,
12(3), pp. 373–383.
[CrossRef]
Chen,
C.
, and
Lee,
C.
, 2004, “
Design and Modeling for Comb Drive Actuator With Enlarged Static Displacement,” Sens. Actuators A,
115, pp. 530–539.
[CrossRef]
Sun,
Y.
,
Nelson,
B. J.
,
Potasek,
D. P.
, and
Enikov,
E.
, 2002, “
A Bulk Microfabricated Multi-Axis Capacitive Cellular Force Sensor Using Transverse Comb Drives,” J. Micromech. Microeng.,
12(6), pp. 832–840.
[CrossRef]
Sun,
Y.
,
Piyabongkarn,
D.
,
Sezen,
A.
,
Nelson,
B. J.
, and
Rajamani,
R.
, 2002, “
A High-Aspect-Ratio Two-Axis Electrostatic Microactuator With Extended Travel Range,” Sens. Actuators A,
102, pp. 49–60.
[CrossRef]
Borovic,
B.
,
Hong,
C.
,
Liu,
A. Q.
,
Xie,
L.
, and
Lewis,
F. L.
, 2004, “
Control of a MEMS Optical Switch,” International Conference on Decision and Control (CDC 2004), Nassau, Bahamas, Dec. 14–17, pp. 3039–3044.
Lu,
M.
, and
Fedder,
G. K.
, 2004, “
Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage,” J. Microelectromech. Syst.,
13(5), pp. 759–769.
[CrossRef]
Borovic,
B.
,
Hong,
C.
,
Zhang,
X. M.
,
Liu,
A. Q.
, and
Lewis,
F. L.
, 2005, “
Open vs. Closed-Loop Control of the MEMS Electrostatic Comb Drive,” 13th Mediterranean Conference on Control and Automation (MED 2005), Limassol, Cyprus, June 27–29, pp. 982–988.
Singer,
N. C.
, 1989, “
Residual Vibration Reduction in Computer Controlled Machines,” MIT Artificial Intelligence Laboratory, Cambridge, MA, Technical Report No. 1030.
Singer,
N. C.
, and
Seering,
W. P.
, 1990, “
Preshaping Command Inputs to Reduce System Vibration,” ASME J. Dyn. Syst., Meas., Control,
112(1), pp. 76–82.
Smith,
O. J.
, 1957, “
Posicast Control of Damped Oscillatory Systems,” IRE, pp. 1249–1255.
Smith,
O. J.
, 1958, Feedback Control Systems,
McGraw-Hill,
New York.
Wie,
B.
, and
Liu,
Q.
, 1992, “
Comparison Between Robustified Feedforward and Feedback for Achieving Parameter Robustness,” J. Guid. Control Dyn.,
15(4), pp. 935–943.
[CrossRef]
Wie,
B.
,
Sinha,
R.
, and
Liu,
Q.
, 1993, “
Robust Time-Optimal Control of Uncertain Structural Dynamic Systems,” J. Guid. Control Dyn.,
16(5), pp. 980–983.
[CrossRef]
Chen,
K. S.
,
Yang,
T. S.
, and
Yin,
J. F.
, 2006, “
Residual Vibration Suppression for Duffing Nonlinear Systems With Electromagnetical Actuation Using Nonlinear Command Shaping Techniques,” ASME J. Vib. Acoust.,
128(6), pp. 778–789.
[CrossRef]
Chen,
K. S.
,
Yang,
T. S.
,
Ou,
K. S.
, and
Yin,
J. F.
, 2009, “
Design of Command Shapers for Residual Vibration Suppression in Duffing Nonlinear Systems,” Mechatronics,
19(2), pp. 184–198.
[CrossRef]
Somà,
A.
, and
Viglietti,
E.
, 2009, “
Lifting Vehicle Comprising Mobile Lifting Arm and Control Device,” European Patent No. EP2218674.
Tzes,
A. P.
,
Englehart,
M. J.
, and
Yurkovich,
S.
, 1989, “
Input Preshaping With Frequency-Domain Information for Flexible Link Manipulator Control,” AIAA Paper No. 89-3565-CP.
Yurkovich,
S.
,
Hilllsley,
K. L.
, and
Tzes,
A. P.
, 1990, “
Identification and Control for a Manipulator With Two Flexible Links,” 29th IEEE Conference on Decision and Control (CDC), Honolulu, HI, Dec. 5–7, pp. 1995–2000.
Drapeau,
V.
, and
Wang,
D.
, 1993, “
Verification of a Closed-Loop Shaped-Input Controller for a Five-Bar-Linkage Manipulator,” IEEE International Conference on Robotics and Automation (ICRA), Atlanta, GA, May 2–6, pp. C216–C221.
Liu,
S. W.
, and
Singh,
T.
, 1997, “
Robust Time-Optimal Control of Nonlinear Structures With Parameter Uncertainties,” ASME J. Dyn. Syst., Meas., Control,
119(4), pp. 743–748.
[CrossRef]
Singh,
T.
, and
Vadali,
S. R.
, 1994, “
Robust Time-Optimal Control: A Frequency Domain Approach,” J. Guid. Control Dyn.,
17 (2), pp. 346–353.
[CrossRef]
Singhose,
W.
,
Bohlke,
K.
, and
Seering,
W.
, 1996, “
Fuel-Efficient Pulse Command Profiles for Flexible Spacecraft,” J. Guid. Control Dyn.,
19(4), pp. 954–960.
[CrossRef]
Singhose,
W.
,
Derezinski,
S.
, and
Singer,
N.
, 1996, “
Extra-Insensitive Input Shapers for Controlling Flexible Spacecraft,” J. Guid. Control Dyn.,
19(2), pp. 385–391.
[CrossRef]
Singhose,
W.
, and
Pao,
L.
, 1997, “
A Comparison of Input Shaping and Time-Optimal Flexible-Body Control,” Control Eng. Pract.,
5(4), pp. 459–467.
[CrossRef]
Shan,
J.
,
Sun,
D.
, and
Liu,
D.
, 2004, “
Design for Robust Component Synthesis Vibration Suppression of Flexible Structures With On–Off Actuators,” IEEE Trans. Rob. Autom.,
20(3), pp. 512–525.
[CrossRef]
Gola,
M. M.
, and
Somà,
A.
, 1993, “
Vibration Control Through Preshaping: Application to a One Link Flexible Robot,” 3rd International Symposium on Measurement and Control in Robotics, Torino, Italy, Sept. 21–24.
Somà,
A.
,
Gugliotta,
A.
,
Gola,
M. M.
, and
Ferrarotti,
G.
, 1995, “
Vibration Control of a Lightweight Flexible Robot: Experimental Results,” International Conference on Recent Advances in Mechatronics (ICRAM'95), Istanbul, Turkey, Aug. 14–16.
Popa,
D. O.
,
Wen,
J. T.
,
Stephanou,
H. E.
,
Skidmore,
G.
, and
Ellis,
M.
, 2004, “
Dynamic Modeling and Input Shaping for MEMS,” NSTI Nanotechnology Conference and Trade Show (NANOTECH 2004), Boston, MA, Mar. 7–11, Vol.
2, pp. 315–318.
Popa,
D. O.
,
Kang,
B. H.
,
Wen,
J. T.
,
Stephanou,
H. E.
,
Skidmore,
G.
, and
Geisberger,
A.
, 2003, “ Dynamic Modeling and Input Shaping of Thermal Bimorph Actuators, IEEE International Conference on Robotics Automation, Taipei, Taiwan.
Chen,
K. S.
, and
Ou,
K. S.
, 2007, “
Command-Shaping Techniques for Electrostatic MEMS Actuation: Analysis and Simulation,” J. Microelectromech. Syst.,
16(3), pp. 537–549.
[CrossRef]
Daqaq,
M. F.
,
Reddy,
C. K.
, and
Nayfeh,
A. H.
, 2008, “
Input-Shaping Control of Nonlinear MEMS,” Nonlinear Dyn.,
54, pp. 167–179.
[CrossRef]
Ou,
K. S.
,
Chen,
K. S.
,
Yang,
T. S.
, and
Lee,
S. Y.
, 2011, “
Fast Positioning and Impact Minimizing of MEMS Devices by Suppression of Motion-Induced Vibration by Command-Shaping Method,” J. Microelectromech. Syst.,
20(1), pp. 128–139.
[CrossRef]
Rabinovich,
A.
,
Ya'akobovitz,
A.
, and
Krylov,
S.
, 2014, “
Fringing Electrostatic Field Actuation of Microplates for Open Air Environment Sensing,” ASME J. Vib. Acoust.,
136(4), p. 041013.
[CrossRef]
Barbato,
M.
,
Giliberto,
V.
,
Cester,
A.
, and
Meneghesso,
G.
, 2014, “
A Combined Mechanical and Electrical Characterization Procedure for Investigating the Dynamic Behavior of RF-MEMS Switches,” IEEE Trans. Device Mater. Reliab.,
14(1), pp. 13–20.
[CrossRef]
Shan,
J.
,
Liu,
H. T.
, and
Sun,
D.
, 2005, “
Modified Input Shaping for a Rotating Single-Link Flexible Manipulator,” J. Sound Vib.,
285, pp. 187–207.
[CrossRef]
De Pasquale,
G.
, and
Veijola,
T.
, 2008, “
Comparative Numerical Study of FEM Methods Solving Gas Damping in Perforated MEMS Devices,” Microfluid. Nanofluid.,
5(4), pp. 517–528.
[CrossRef]
Margesin,
B.
,
Bagolini,
A.
,
Guarnieri,
I.
,
Giacomozzi,
F.
, and
Faes,
A.
, 2003, “
Stress Characterization of Electroplated Gold Layers for Low Temperature Surface Micromachining,” DTIP, Mandelieu-la-Napoule, France, pp. 402–405.
De Pasquale,
G.
,
Veijola,
T.
, and
Somà,
A.
, 2010, “
Modelling and Validation of Air Damping in Perforated Gold and Silicon MEMS Plates,” J. Micromech. Microeng.,
20(1), p. 015010.
[CrossRef]