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Research Papers

Preshaping Command Functions to Control the Dynamic Impacts in MEMS

[+] Author and Article Information
Aurelio Somà

Department of Mechanical
and Aerospace Engineering,
Politecnico di Torino,
Corso Duca degli Abruzzi 24,
Torino 10129, Italy

Giorgio De Pasquale

Department of Mechanical
and Aerospace Engineering,
Politecnico di Torino,
Corso Duca degli Abruzzi 24,
Torino 10129, Italy
e-mail: giorgio.depasquale@polito.it

1Corresponding author.

Contributed by the Technical Committee on Vibration and Sound of ASME for publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received April 14, 2014; final manuscript received September 30, 2015; published online November 4, 2015. Assoc. Editor: Jeffrey F. Rhoads.

J. Vib. Acoust 138(1), 011013 (Nov 04, 2015) (10 pages) Paper No: VIB-14-1136; doi: 10.1115/1.4031754 History: Received April 14, 2014; Revised September 30, 2015

The control of electrostatically actuated microsystems with open-loop strategies has the potential to reduce the switching time with immediate benefits on device performances and, on the other hand, to reduce the impact velocity between electrodes with benefits on the device lifetime and reliability. By applying to micro-electro-mechanical systems (MEMS) the controlled methods already validated on machines, it was demonstrated that the accuracy of the control is scalable with the dimensions. Residual vibrations of microstructures in the nanometer range are almost completely suppressed: they are reduced to 6% of the uncontrolled vibration amplitude. The reasons for implementing this kind of control are related to reliability enhancement, by reducing the impact velocity, and for the improvement of device dynamic performances. The robustness of the control method against errors in dynamic parameters evaluation was also demonstrated.

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References

De Pasquale, G. , Barbato, M. , Giliberto, V. , Meneghesso, G. , and Somà, A. , 2012, “ Reliability Improvement in Microstructures by Reducing the Impact Velocity Through Electrostatic Force Modulation,” Microelectron. Reliab., 52, pp. 1808–1811. [CrossRef]
Tazzoli, A. , Barbato, M. , Mattiuzzo, F. , Ritrovato, V. , and Meneghesso, G. , 2010, “ Study of the Actuation Speed, Bounces Occurrences, and Contact Reliability of Ohmic RF-MEMS Switches,” Microelectron. Reliab., 50(9–11), pp. 1604–1608. [CrossRef]
De Pasquale, G. , Somà, A. , Barbato, M. , and Meneghesso, G. , 2014, “ Impact Wear and Other Contact Effects on the Electro-Mechanical Reliability of MEMS,” Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Cannes, France, Apr. 1–4, pp. 7–12.
Grade, J. D. , Jerman, H. , and Kenny, T. W. , 2003, “ Design of Large Deflection Electrostatic Actuators,” J. Microelectromech. Syst., 12(3), pp. 335–343. [CrossRef]
Jensen, B. D. , Mutlu, S. , Miller, S. , Kurabayashi, K. , and Allen, J. J. , 2003, “ Shaped Comb Fingers for Tailored Electromechanical Restoring Force,” J. Microelectromech. Syst., 12(3), pp. 373–383. [CrossRef]
Chen, C. , and Lee, C. , 2004, “ Design and Modeling for Comb Drive Actuator With Enlarged Static Displacement,” Sens. Actuators A, 115, pp. 530–539. [CrossRef]
Sun, Y. , Nelson, B. J. , Potasek, D. P. , and Enikov, E. , 2002, “ A Bulk Microfabricated Multi-Axis Capacitive Cellular Force Sensor Using Transverse Comb Drives,” J. Micromech. Microeng., 12(6), pp. 832–840. [CrossRef]
Sun, Y. , Piyabongkarn, D. , Sezen, A. , Nelson, B. J. , and Rajamani, R. , 2002, “ A High-Aspect-Ratio Two-Axis Electrostatic Microactuator With Extended Travel Range,” Sens. Actuators A, 102, pp. 49–60. [CrossRef]
Borovic, B. , Hong, C. , Liu, A. Q. , Xie, L. , and Lewis, F. L. , 2004, “ Control of a MEMS Optical Switch,” International Conference on Decision and Control (CDC 2004), Nassau, Bahamas, Dec. 14–17, pp. 3039–3044.
Lu, M. , and Fedder, G. K. , 2004, “ Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage,” J. Microelectromech. Syst., 13(5), pp. 759–769. [CrossRef]
Borovic, B. , Hong, C. , Zhang, X. M. , Liu, A. Q. , and Lewis, F. L. , 2005, “ Open vs. Closed-Loop Control of the MEMS Electrostatic Comb Drive,” 13th Mediterranean Conference on Control and Automation (MED 2005), Limassol, Cyprus, June 27–29, pp. 982–988.
Singer, N. C. , 1989, “ Residual Vibration Reduction in Computer Controlled Machines,” MIT Artificial Intelligence Laboratory, Cambridge, MA, Technical Report No. 1030.
Singer, N. C. , and Seering, W. P. , 1990, “ Preshaping Command Inputs to Reduce System Vibration,” ASME J. Dyn. Syst., Meas., Control, 112(1), pp. 76–82.
Smith, O. J. , 1957, “ Posicast Control of Damped Oscillatory Systems,” IRE, pp. 1249–1255.
Smith, O. J. , 1958, Feedback Control Systems, McGraw-Hill, New York.
Wie, B. , and Liu, Q. , 1992, “ Comparison Between Robustified Feedforward and Feedback for Achieving Parameter Robustness,” J. Guid. Control Dyn., 15(4), pp. 935–943. [CrossRef]
Wie, B. , Sinha, R. , and Liu, Q. , 1993, “ Robust Time-Optimal Control of Uncertain Structural Dynamic Systems,” J. Guid. Control Dyn., 16(5), pp. 980–983. [CrossRef]
Chen, K. S. , Yang, T. S. , and Yin, J. F. , 2006, “ Residual Vibration Suppression for Duffing Nonlinear Systems With Electromagnetical Actuation Using Nonlinear Command Shaping Techniques,” ASME J. Vib. Acoust., 128(6), pp. 778–789. [CrossRef]
Chen, K. S. , Yang, T. S. , Ou, K. S. , and Yin, J. F. , 2009, “ Design of Command Shapers for Residual Vibration Suppression in Duffing Nonlinear Systems,” Mechatronics, 19(2), pp. 184–198. [CrossRef]
Somà, A. , and Viglietti, E. , 2009, “ Lifting Vehicle Comprising Mobile Lifting Arm and Control Device,” European Patent No. EP2218674.
Tzes, A. P. , Englehart, M. J. , and Yurkovich, S. , 1989, “ Input Preshaping With Frequency-Domain Information for Flexible Link Manipulator Control,” AIAA Paper No. 89-3565-CP.
Yurkovich, S. , Hilllsley, K. L. , and Tzes, A. P. , 1990, “ Identification and Control for a Manipulator With Two Flexible Links,” 29th IEEE Conference on Decision and Control (CDC), Honolulu, HI, Dec. 5–7, pp. 1995–2000.
Drapeau, V. , and Wang, D. , 1993, “ Verification of a Closed-Loop Shaped-Input Controller for a Five-Bar-Linkage Manipulator,” IEEE International Conference on Robotics and Automation (ICRA), Atlanta, GA, May 2–6, pp. C216–C221.
Liu, S. W. , and Singh, T. , 1997, “ Robust Time-Optimal Control of Nonlinear Structures With Parameter Uncertainties,” ASME J. Dyn. Syst., Meas., Control, 119(4), pp. 743–748. [CrossRef]
Singh, T. , and Vadali, S. R. , 1994, “ Robust Time-Optimal Control: A Frequency Domain Approach,” J. Guid. Control Dyn., 17 (2), pp. 346–353. [CrossRef]
Singhose, W. , Bohlke, K. , and Seering, W. , 1996, “ Fuel-Efficient Pulse Command Profiles for Flexible Spacecraft,” J. Guid. Control Dyn., 19(4), pp. 954–960. [CrossRef]
Singhose, W. , Derezinski, S. , and Singer, N. , 1996, “ Extra-Insensitive Input Shapers for Controlling Flexible Spacecraft,” J. Guid. Control Dyn., 19(2), pp. 385–391. [CrossRef]
Singhose, W. , and Pao, L. , 1997, “ A Comparison of Input Shaping and Time-Optimal Flexible-Body Control,” Control Eng. Pract., 5(4), pp. 459–467. [CrossRef]
Shan, J. , Sun, D. , and Liu, D. , 2004, “ Design for Robust Component Synthesis Vibration Suppression of Flexible Structures With On–Off Actuators,” IEEE Trans. Rob. Autom., 20(3), pp. 512–525. [CrossRef]
Gola, M. M. , and Somà, A. , 1993, “ Vibration Control Through Preshaping: Application to a One Link Flexible Robot,” 3rd International Symposium on Measurement and Control in Robotics, Torino, Italy, Sept. 21–24.
Somà, A. , Gugliotta, A. , Gola, M. M. , and Ferrarotti, G. , 1995, “ Vibration Control of a Lightweight Flexible Robot: Experimental Results,” International Conference on Recent Advances in Mechatronics (ICRAM'95), Istanbul, Turkey, Aug. 14–16.
Popa, D. O. , Wen, J. T. , Stephanou, H. E. , Skidmore, G. , and Ellis, M. , 2004, “ Dynamic Modeling and Input Shaping for MEMS,” NSTI Nanotechnology Conference and Trade Show (NANOTECH 2004), Boston, MA, Mar. 7–11, Vol. 2, pp. 315–318.
Popa, D. O. , Kang, B. H. , Wen, J. T. , Stephanou, H. E. , Skidmore, G. , and Geisberger, A. , 2003, “ Dynamic Modeling and Input Shaping of Thermal Bimorph Actuators, IEEE International Conference on Robotics Automation, Taipei, Taiwan.
Chen, K. S. , and Ou, K. S. , 2007, “ Command-Shaping Techniques for Electrostatic MEMS Actuation: Analysis and Simulation,” J. Microelectromech. Syst., 16(3), pp. 537–549. [CrossRef]
Daqaq, M. F. , Reddy, C. K. , and Nayfeh, A. H. , 2008, “ Input-Shaping Control of Nonlinear MEMS,” Nonlinear Dyn., 54, pp. 167–179. [CrossRef]
Ou, K. S. , Chen, K. S. , Yang, T. S. , and Lee, S. Y. , 2011, “ Fast Positioning and Impact Minimizing of MEMS Devices by Suppression of Motion-Induced Vibration by Command-Shaping Method,” J. Microelectromech. Syst., 20(1), pp. 128–139. [CrossRef]
Rabinovich, A. , Ya'akobovitz, A. , and Krylov, S. , 2014, “ Fringing Electrostatic Field Actuation of Microplates for Open Air Environment Sensing,” ASME J. Vib. Acoust., 136(4), p. 041013. [CrossRef]
Barbato, M. , Giliberto, V. , Cester, A. , and Meneghesso, G. , 2014, “ A Combined Mechanical and Electrical Characterization Procedure for Investigating the Dynamic Behavior of RF-MEMS Switches,” IEEE Trans. Device Mater. Reliab., 14(1), pp. 13–20. [CrossRef]
Shan, J. , Liu, H. T. , and Sun, D. , 2005, “ Modified Input Shaping for a Rotating Single-Link Flexible Manipulator,” J. Sound Vib., 285, pp. 187–207. [CrossRef]
De Pasquale, G. , and Veijola, T. , 2008, “ Comparative Numerical Study of FEM Methods Solving Gas Damping in Perforated MEMS Devices,” Microfluid. Nanofluid., 5(4), pp. 517–528. [CrossRef]
Margesin, B. , Bagolini, A. , Guarnieri, I. , Giacomozzi, F. , and Faes, A. , 2003, “ Stress Characterization of Electroplated Gold Layers for Low Temperature Surface Micromachining,” DTIP, Mandelieu-la-Napoule, France, pp. 402–405.
De Pasquale, G. , Veijola, T. , and Somà, A. , 2010, “ Modelling and Validation of Air Damping in Perforated Gold and Silicon MEMS Plates,” J. Micromech. Microeng., 20(1), p. 015010. [CrossRef]

Figures

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Fig. 1

Experimental displacement (a) and velocity (b) of RF-MEMS series switch armature actuated with step functions at 0.2 ms (continuous line) and 1.2 ms (dashed line) rise times [13]

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Fig. 2

Two-impulse input model (a) and three-impulse input model (b)

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Fig. 3

Optical image of a test structure (sample C)

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Fig. 4

Interferometric microscope (a) and laser Doppler vibrometer (b)

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Fig. 5

Shaped actuation functions applied to the samples with 1, 2, and 3 steps

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Fig. 6

Voltage–displacement curve of sample A measured with the optical profilometer on the top surface of the movable electrode

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Fig. 7

Dynamic response of sample A to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions

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Fig. 8

Dynamic response of sample B to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions

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Fig. 9

Dynamic response of sample C to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions

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Fig. 10

Dynamic response of sample A to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions without considering the effect of damping in calculating the timing of intermediate actuation steps

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Fig. 11

Shaped actuation functions for controlling both actuation and release

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Fig. 12

Dynamic response of sample B to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions applied to the actuation and to the release

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