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Research Papers

Preshaping Command Functions to Control the Dynamic Impacts in MEMS

[+] Author and Article Information
Aurelio Somà

Department of Mechanical
and Aerospace Engineering,
Politecnico di Torino,
Corso Duca degli Abruzzi 24,
Torino 10129, Italy

Giorgio De Pasquale

Department of Mechanical
and Aerospace Engineering,
Politecnico di Torino,
Corso Duca degli Abruzzi 24,
Torino 10129, Italy
e-mail: giorgio.depasquale@polito.it

1Corresponding author.

Contributed by the Technical Committee on Vibration and Sound of ASME for publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received April 14, 2014; final manuscript received September 30, 2015; published online November 4, 2015. Assoc. Editor: Jeffrey F. Rhoads.

J. Vib. Acoust 138(1), 011013 (Nov 04, 2015) (10 pages) Paper No: VIB-14-1136; doi: 10.1115/1.4031754 History: Received April 14, 2014; Revised September 30, 2015

The control of electrostatically actuated microsystems with open-loop strategies has the potential to reduce the switching time with immediate benefits on device performances and, on the other hand, to reduce the impact velocity between electrodes with benefits on the device lifetime and reliability. By applying to micro-electro-mechanical systems (MEMS) the controlled methods already validated on machines, it was demonstrated that the accuracy of the control is scalable with the dimensions. Residual vibrations of microstructures in the nanometer range are almost completely suppressed: they are reduced to 6% of the uncontrolled vibration amplitude. The reasons for implementing this kind of control are related to reliability enhancement, by reducing the impact velocity, and for the improvement of device dynamic performances. The robustness of the control method against errors in dynamic parameters evaluation was also demonstrated.

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References

Figures

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Fig. 1

Experimental displacement (a) and velocity (b) of RF-MEMS series switch armature actuated with step functions at 0.2 ms (continuous line) and 1.2 ms (dashed line) rise times [13]

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Fig. 2

Two-impulse input model (a) and three-impulse input model (b)

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Fig. 4

Interferometric microscope (a) and laser Doppler vibrometer (b)

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Fig. 5

Shaped actuation functions applied to the samples with 1, 2, and 3 steps

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Fig. 12

Dynamic response of sample B to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions applied to the actuation and to the release

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Fig. 6

Voltage–displacement curve of sample A measured with the optical profilometer on the top surface of the movable electrode

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Fig. 3

Optical image of a test structure (sample C)

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Fig. 7

Dynamic response of sample A to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions

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Fig. 8

Dynamic response of sample B to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions

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Fig. 9

Dynamic response of sample C to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions

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Fig. 10

Dynamic response of sample A to the 1 step (a), 2 steps (b), and 3 steps (c) shaped control functions without considering the effect of damping in calculating the timing of intermediate actuation steps

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Fig. 11

Shaped actuation functions for controlling both actuation and release

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