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Research Papers

Development of an Active Vibration Isolation System Using Linearized Zero-Power Control With Weight Support Springs

[+] Author and Article Information
Md. Emdadul Hoque

Department of Mechanical Engineering, Saitama University, 255 Shimo-Okubo, Sakura-Ku, Saitama 338-8570, Japanmehoque@mech.saitama-u.ac.jp

Takeshi Mizuno, Daisuke Kishita, Masaya Takasaki, Yuji Ishino

Department of Mechanical Engineering, Saitama University, 255 Shimo-Okubo, Sakura-Ku, Saitama 338-8570, Japan

J. Vib. Acoust 132(4), 041006 (May 25, 2010) (9 pages) doi:10.1115/1.4000968 History: Received December 17, 2008; Revised December 09, 2009; Published May 25, 2010; Online May 25, 2010

This paper presents a hybrid vibration isolation system using linearized zero-power control with weight support springs. The isolation system, fundamentally, is developed by linking a mechanical spring in series with a negative stiffness spring realized by zero-power control in order to insulate ground vibration as well as to reject the effect of on-board-generated direct disturbances. In the original system, the table is suspended from the middle table solely by the attractive force produced by the magnets and therefore, the maximum supporting force on the table is limited by the capacity of the permanent magnets used for zero-power control. To meet the growing demand to support heavy payload on the table, the physical model is extended by introducing an additional mechanism-weight support springs, in parallel with the above system. However, the nonlinearity of the zero-power control instigates a nonlinear vibration isolation system, which leads to a deviation from zero compliance to direct disturbance. Therefore, a nonlinear compensator for the zero-power control is employed furthermore to the system to meet the ever-increasing precise disturbance rejection requirements in the hi-technology systems. The fundamental characteristics of the system are explained analytically and the improved control performances are demonstrated experimentally.

Copyright © 2010 by American Society of Mechanical Engineers
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Figures

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Figure 1

Zero-compliance system using zero-power magnetic suspension

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Figure 2

Basic model of zero-power magnetic suspension with weight support spring

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Figure 3

Basic structure of the vibration isolation system using weight support spring

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Figure 4

Basic model of zero-power magnetic suspension system

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Figure 5

Block diagram of the nonlinear compensator arrangement

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Figure 6

Developed vibration isolation system: (a) photograph and (b) schematic diagram (front view)

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Figure 7

Sensors and actuators position (top view). Dimensions are in millimeters.

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Figure 8

Block diagram of the mode-based controller

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Figure 9

Static response of the isolation table to direct disturbance in the vertical direction (Z)

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Figure 10

Load-stiffness characteristic of the zero-power control system

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Figure 11

Load-stiffness characteristics of the zero-power control with nonlinear compensation

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Figure 12

Static response to direct disturbance with nonlinear control in the vertical direction (Z)

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Figure 13

Control current of the electromagnets for the linearized zero-power controller

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Figure 14

Static response to direct disturbance with nonlinear control (d2=40) in the roll mode (Θy)

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Figure 15

Static response to direct disturbance with nonlinear control (d2=50) in the pitch mode (Θx)

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Figure 16

Dynamic response of the isolation table to direct disturbance in the vertical translational direction

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Figure 17

Dynamic response of the isolation table to direct disturbance in the pitch mode

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Figure 18

Frequency response of the isolation table to dynamic direct disturbance using zero-compliance control and conventional passive suspension technique

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