Active Vibration Isolation of Metrology Frames; A Modal Decoupled Control Design

[+] Author and Article Information
Marcel Heertjes, Koen de Graaff

Philips Centre for Industrial Technology, Department Mechatronics Technologies, PO Box 218, SAQ-1137/1132, 5600 MD Eindhoven, The Netherlands

Jan-Gerard van der Toorn

Department Mechatronics Systems Development, De run 1110, 5503 LA Veldhoven, The Netherlands

J. Vib. Acoust 127(3), 223-233 (Jun 01, 2005) (11 pages) doi:10.1115/1.1897741 History: Received May 03, 2004; Revised October 13, 2004; Accepted October 21, 2004; Online May 18, 2005


For a six degree-of-freedom active vibration isolation system, a control strategy based on modal decoupling is proposed. This has the advantage of controlling the modal directions on a centralized single-input single-output basis. As a consequence, stability and performance can be imposed in each of the modal directions separately. An experimental demonstration is given using a dummy metrology frame. That is, a 1600 kg payload mass supported by three combined pneumatic and Lorentz controlled isolators. With this setup, two unstable modal directions resulting from a high center of gravity are stabilized without compromising performance in any of the remaining directions. In fact, performance in the remaining directions is enhanced using manual loop shaping.

Copyright © 2005 by American Society of Mechanical Engineers
Your Session has timed out. Please sign back in to continue.






Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In