On the Nonlinear Dynamics of Tether Suspensions for MEMS

[+] Author and Article Information
Wyatt O. Davis, Oliver M. O’Reilly

Department of Mechanical Engineering, University of California, Berkeley, California 94720-1740e-mail: oreilly@me.berkeley.edu

Albert P. Pisano

Departments of Mechanical Engineering and Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720-1740e-mail: appisano@me.berkeley.edu

J. Vib. Acoust 126(3), 326-331 (Jul 30, 2004) (6 pages) doi:10.1115/1.1760558 History: Received September 01, 2002; Revised April 01, 2003; Online July 30, 2004
Copyright © 2004 by ASME
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Scanning electron micrograph (SEM) of a surface-micromachined dual-axis gyroscope, after Juneau and Pisano 3. It was fabricated by Sandia National Laboratory for this research. As may be seen from the SEM, the outer ring serves as the proof mass which is attached to the substrate by tethers and actuated by eight comb drives. This gyroscope is designed to measure the two in-plane components of the angular velocity of the substrate.
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Three geometries of tethers suspensions of interest: (a) inside-suspended ring, (b) outside-suspended ring, and (c) translational body.
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The tether geometry and the reference configuration of the Cosserat rod. The axial centerline of the rod coincides with the reference configuration of the material curve C of the Cosserat rod and D3=E3.
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Schematic of a proof mass (rotor) suspended by four identical tethers of length L.
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Predictions of the restoring torque as a function of angular displacement ϕ. The parameter values for the chosen device are given in Table I.
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Sensing method used to measure the frequency response of the gyroscope. The voltages vin and vout were supplied and measured, respectively, using a network analyzer.
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Sample frequency responses for the gyroscope which were measured using the experimental apparatus shown in Fig. 6. The DC bias voltage was 5 V and results are shown for vin=1, 5, and 10 mV. In the interests of clarity, only forward sweeps are shown. The ambient pressure for these results was 22 mTorr.
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Predicted frequency responses of the gyroscope according to (22). In the interests of comparison to Fig. 7, only forward sweeps in frequency are shown.




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