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TECHNICAL PAPERS

Coupled Vibration of Microcantilever Array Induced by Airflow Force

[+] Author and Article Information
Hiroshi Hosaka, Kiyoshi Itao

Department of Environmental Studies, Graduate School of Frontier Sciences, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan

J. Vib. Acoust 124(1), 26-32 (Jul 01, 2001) (7 pages) doi:10.1115/1.1421054 History: Received January 01, 2000; Revised July 01, 2001
Copyright © 2002 by ASME
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References

Figures

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Relationships between streamline and Reynolds number (a) Re≫1 (b) Re≪1 (c) Sphere
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Normalized airflow velocity around an oscillating sphere (2R=0.1 μm,ω=83.3×106 rad/s)
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Normalized airflow velocity around an oscillating sphere (2R=10 μm,ω=83.3×104 rad/s)
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Normalized airflow velocity around an oscillating sphere (2R=1 mm,ω=83.3×102 rad/s)
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Relationship between beam length and damping ratio of silicon cantilever
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Experimental and calculated damping ratios of silicon cantilever
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Experimental apparatus for measuring coupled vibration
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Relationship between beam distance and amplitude ratio in enlarged model experiment
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Relationships among beam distance, beam length, material and amplitude ratio
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Relationships among beam distance, beam length, resonance difference and amplitude ratio

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