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TECHNICAL PAPERS

Coupled Vibration of Microcantilever Array Induced by Airflow Force

[+] Author and Article Information
Hiroshi Hosaka, Kiyoshi Itao

Department of Environmental Studies, Graduate School of Frontier Sciences, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan

J. Vib. Acoust 124(1), 26-32 (Jul 01, 2001) (7 pages) doi:10.1115/1.1421054 History: Received January 01, 2000; Revised July 01, 2001
Copyright © 2002 by ASME
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References

Ohkubo,  T., Kishigami,  J., Yanagisawa,  K., and Kaneko,  R., 1991, “Submicron Magnetizing and Its Detection Based on Point Magnetic Recording Concept,” IEEE Trans. Magn., 27, pp. 5286–5288.
Itoh,  T., Azumi,  R., and Suga,  T., 1997, “Piezoelectric Microcantilever Array for Multiprobe Scanning Force Microscopy,” IEICE Trans. Electron., E80-C, pp. 269–273.
Sampsell, J. B., 1993, “The Digital Micromirror Device and Its Application to Projection Displays,” Proc. 7th Int. Conf. Solid-State Sensors and Actuators, Yokohama, pp. 24–27.
Hosaka, H., Kuwano, H., and Yanagisawa, K., 1993, “Electromagnetic Microrelays: Concepts and Fundamental Characteristics,” Proc. IEEE MEMS Workshop, Fort Lauderdale, pp. 12–17.
Blom,  F. R., Bouwstra,  S., Elwenspoek,  M., and Fluitman,  J. H. J., 1992, “Dependence of the Quality Factor of Micromachined Silicon Beam Resonators on Pressure and Geometry,” J. Vac. Sci. Technol. B, B10, pp. 19–26.
Terasawa,  T., Kawamura,  Y., Sato,  K., and Tanaka,  S., 1988, “Pressure Dependent Dynamic Characteristics of Miniature Silicon Oscillator,” Bull. JSME, 22, pp. 49–54.
Kokubun,  K., Murakami,  H., Toda,  Y., and Ono,  M., 1984, “A Bending and Stretching Mode Crystal Oscillator as Friction Vacuum Gauge,” Vacuum, 34, pp. 731–735.
Hosaka,  H., and Itao,  K., 1999, “Theoretical and Experimental Study on Airflow Damping of Vibrating Microcantilevers,” ASME J. Vibr. Acoust., 121, pp. 64–69.
Lamb, H., 1945, Hydrodynamics, 6th edition, Dover Publications, New York, p. 605.
Landau, L. D., and Lifshits, E. M., 1959, Fluid Mechanics, Pergamon Press, London, p. 95.

Figures

Grahic Jump Location
Relationships between streamline and Reynolds number (a) Re≫1 (b) Re≪1 (c) Sphere
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Normalized airflow velocity around an oscillating sphere (2R=0.1 μm,ω=83.3×106 rad/s)
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Normalized airflow velocity around an oscillating sphere (2R=10 μm,ω=83.3×104 rad/s)
Grahic Jump Location
Normalized airflow velocity around an oscillating sphere (2R=1 mm,ω=83.3×102 rad/s)
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Relationship between beam length and damping ratio of silicon cantilever
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Experimental and calculated damping ratios of silicon cantilever
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Experimental apparatus for measuring coupled vibration
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Relationship between beam distance and amplitude ratio in enlarged model experiment
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Relationships among beam distance, beam length, material and amplitude ratio
Grahic Jump Location
Relationships among beam distance, beam length, resonance difference and amplitude ratio

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