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TECHNICAL PAPERS

Dynamic Modeling and Vibration Analysis of the Atomic Force Microscope

[+] Author and Article Information
Rong-Fong Fung

Department of Mechanical and Automation Engineering, National Kaohsiung First University of Science and Technology, 1 University Road, Yuanchau, Kaohsiung, Taiwan 824, ROC

Shih-Chien Huang

Department of Mechanical Engineering, Chung Yuan Christian University, Chung-Li, Taiwan 320, ROC

J. Vib. Acoust 123(4), 502-509 (May 01, 2001) (8 pages) doi:10.1115/1.1389084 History: Received June 01, 2000; Revised May 01, 2001
Copyright © 2001 by ASME
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References

Figures

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Schematic diagrams (a) the microcantilever AFM (b) the deformed configuration (c) the materials and dimensions of the composite beam
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The free-body diagrams of the triangular rigid segment (a) the force balance diagram (b) the moment balance diagram
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The force-distance curve of the Lennard-Jones potential
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The numerical results of the contact AFM without initial deflection and damper (a) the transient diagram of the repulsive forces (b) the enlarged force diagram (c) the response diagram of the tip (d) the induced charge
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The numerical results of the contact AFM with initial deflection and damper (a) the transient diagram of the repulsive forces (b) the response diagram of the tip
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The numerical results due to base oscillator (a) the time-history acceleration of the base oscillation (b) the initial distance between the tip and the sample (c) the transient vdW forces (d) the response of the tip (e) the induced charge. (—, pertains to the vdW force with a jump initial distance; [[dashed_line]], pertains to the vdW force with constant initial distance; [[ellipsis]], neglecting the vdW force).
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The numerical results due to the external voltage (a) the time-history of the external voltage (b) the transient vdW forces (c) the responses of the tip (d) the induced charge. (—, pertains to the vdW force with a jump initial distance; [[dashed_line]], pertains to the vdW force with constant initial distance; [[ellipsis]], neglecting the vdW force).

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