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TECHNICAL PAPERS

An Active Microvibration Isolation System for Hi-tech Manufacturing Facilities

[+] Author and Article Information
H. Yoshioka

Dept. of Civil Engrg. and Geo. Sci., Univ. of Notre Dame, Notre Dame, IN 46556-0767

Y. Takahashi, K. Katayama

Takenaka Corporation, 4-1-13, Hon-machi, Chuoh-ku, Osaka, 541-0053, Japan

T. Imazawa, N. Murai

Takenaka Corporation, R&D Institute, 1-5-1, Ohtsuka, Inzai-shi, Chiba, 270-1395, Japan

J. Vib. Acoust 123(2), 269-275 (Oct 01, 2000) (7 pages) doi:10.1115/1.1350566 History: Received August 01, 2000; Revised October 01, 2000
Copyright © 2001 by ASME
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References

Figures

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Generic vibration criteria curves represented by the 1/3 octave spectrum of the RMS velocity for vibration sensitive equipment and semiconductor facilities 29
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Various vibration sources and transmission routes to precision machines
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Active microvibration isolation table
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Bending modes of the vibration isolation table
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Layout of actuators and sensors
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Block diagram of the classical controller
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Analytical transfer function from ground to the modal acceleration
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Acceleration in the vertical direction under microvibration
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Acceleration in the vertical direction under earthquake
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The effect of adding feedforward control in the vertical direction
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Acceleration waveform at the vertical sensor 5d due to vertical impact excitation at edge of vibration isolation table
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Transfer function from the force applied at the edge of the isolation table to the acceleration at the vertical sensor 5d
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Representation of the real number by the binary digit
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Analytical horizontal (x) modal acceleration transfer function from the floor to the isolation table
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Experimental horizontal (x) modal acceleration transfer function from the floor to the isolation table
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1/3 octave acceleration in the vertical direction

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