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TECHNICAL PAPERS

An Active Microvibration Isolation System for Hi-tech Manufacturing Facilities

[+] Author and Article Information
H. Yoshioka

Dept. of Civil Engrg. and Geo. Sci., Univ. of Notre Dame, Notre Dame, IN 46556-0767

Y. Takahashi, K. Katayama

Takenaka Corporation, 4-1-13, Hon-machi, Chuoh-ku, Osaka, 541-0053, Japan

T. Imazawa, N. Murai

Takenaka Corporation, R&D Institute, 1-5-1, Ohtsuka, Inzai-shi, Chiba, 270-1395, Japan

J. Vib. Acoust 123(2), 269-275 (Oct 01, 2000) (7 pages) doi:10.1115/1.1350566 History: Received August 01, 2000; Revised October 01, 2000
Copyright © 2001 by ASME
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References

Heiland, D., and Beyer, K., 1998, “Vibration in Semiconductor Fabs,” Workshop on Effect of High-Speed Vibration on Structures and Equipment, pp. 63–76, Taiwan, ROC.
Yang, Y. N., and Agrawal, A. K., 1998, “Protective System for Microvibration Reduction of Buildings,” Asia-Pacific Workshop on Seismic Design & Retrofit of Structures, pp. 319–333, Aug. 10–12.
Takahashi, Y., Katayama, K., Murai, N., and Fujita, T., 1989, “Active Vibration Control System Using Linear Motor,” 5th International Precision Engineering Seminar and Annual Meeting of the Precision Engineering Division, Monterey, California.
Fujita, T., Tagawa, Y., Kajiwara, K., Yoshioka, H., Takeshita, A., and Yasuda, M., 1992, “Active 6-DOF Microvibratoin Control System Using Piezoelectric Actuators,” Third International Conference on Adaptive Structures, pp. 514–528.
Fujita, T., Kajiwara, K., Takeshita, A., Yoshioka, H., and Yasuda, M., 1994, “Active Microvibration Control System with Elastic Vibration of Equipment-Table System,” 5th International Conference on Adaptive Structures, pp. 612–622.
Watanabe, K., Hara, S., Kanemitsu, Y., Haga, T., Yano, K., Mizuno, T., and Katamura, R., 1996, “Combination of H and P1 Control for an Electromagnetically Levitated Vibration Isolation System,” Proceedings of the 35th Conference on Decision and Control, Kobe, Japan, pp. 1223–1228.
Yasuda, M., Osaka, T., and Ikeda, M., 1996, “Feedforward Control of a Vibration Isolation System for Disturbance Suppression,” Proceedings of the 35th Conference on Decision and Control, Kobe, Japan, pp. 1229–1233.
Yoshioka, H., and Murai, N., 1999, “Active Microvibration Control System by Pole Assignment Method using Genetic Algorithm,” Proc. of the SPIE Conference on Smart Structures and Integrated Systems, Newport Beach, California, pp. 980–986.
Ungar,  E. E., Sturz,  D. H., and Amick,  C. H., 1990, “Vibration Control Design of High Technology Facilities,” Sound Vib., 24, No. 7, pp. 20–27.
Meirovitch, L., and Öz, H., 1980, “Active Control of Structures by Modal Synthesis,” Structural Control, H. H. E. Leipholz, ed., North-Holland Publishing Co., Amsterdam, pp. 505–521.
Yoshioka, H., Murai, N., Abe, T., and Hashimoto, Y., 1997, “Active Microvibration Control System by Considering Elastic Deformation Modes of Vibration Table,” IMAC-XV, Japan.
Goldberg, D. E., 1989, Genetic Algorithms in Search, Optimization & Machine Learning, Addison-Wesley, Reading, MA.
Dasgupta, D., and McGregor, D. R., 1993, “Genetically Designing Neuro-controllers for a Dynamic System,” Proceedings of the International Joint Conference on Neural Networks (IJCNN), pp. 2951–2955, Nagoya, Japan.

Figures

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Generic vibration criteria curves represented by the 1/3 octave spectrum of the RMS velocity for vibration sensitive equipment and semiconductor facilities 29
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Various vibration sources and transmission routes to precision machines
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Active microvibration isolation table
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Bending modes of the vibration isolation table
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Layout of actuators and sensors
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Block diagram of the classical controller
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Analytical transfer function from ground to the modal acceleration
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Acceleration in the vertical direction under microvibration
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Acceleration in the vertical direction under earthquake
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The effect of adding feedforward control in the vertical direction
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Acceleration waveform at the vertical sensor 5d due to vertical impact excitation at edge of vibration isolation table
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Transfer function from the force applied at the edge of the isolation table to the acceleration at the vertical sensor 5d
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Representation of the real number by the binary digit
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Analytical horizontal (x) modal acceleration transfer function from the floor to the isolation table
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Experimental horizontal (x) modal acceleration transfer function from the floor to the isolation table
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1/3 octave acceleration in the vertical direction

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