Theoretical and Experimental Study on Airflow Damping of Vibrating Microcantilevers

[+] Author and Article Information
H. Hosaka, K. Itao

Dept. of Precision Engineering, The University of Tokyo 7-3-1, Hongo, Bunkyo-Ku, Tokyo 113-8656, Japan Phone & Fax: +81 3 5802 8801

J. Vib. Acoust 121(1), 64-69 (Jan 01, 1999) (6 pages) doi:10.1115/1.2893949 History: Received February 01, 1997; Online February 26, 2008


The damping characteristics of microcantilevers are clarified analytically and experimentally to establish a dynamic design method of micromechanical systems. First, an approximate formula of airflow damping was derived using the Navier-Stokes equation. A precise measurement apparatus was then developed to verify the theory. The damping ratios of cantilevers ranging from 0.1 mm to 100 mm in length were measured, and the effects of beam size, vibrational mode number, and vibrational amplitude on the damping ratio were studied.

Copyright © 1999 by The American Society of Mechanical Engineers
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